Brooks Marathon Express - Page 77

Brooks Automation 3. Installation
Part Number: 605914 Rev. B Installation Procedure
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Argon
ArgonmaybeconnectedtotheMarathonExpressintheoptionalTopCooler.A1/4inchVCR
connectionmaybeprovidedontheMXsystemontheGasFacilitiesPanel,oritmaybeprovidedon
theTopCooler.Referto"FacilitiesSpecifications"onpage21forargongasrequirements.Ensure
thattheargonconnectionisfortheappropriatepressure.
DonotturnontheargonsupplyuntilallconnectionstotheMarathonExpressandallinstallationprocedureshave
beencompleted.
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Step Action
1.
ConnecttheargonlinefromthefacilitytotheargonconnectionontheMXsystem’sTopCooleras
showninFigure3-6.
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Vacuum
AnappropriateusersuppliedvacuumsystemmustbeconnectedtotheMarathonExpressVacuum
BackEndtoprovidethedesiredpump-downtimesforthevacuumchambers.Referto"Facilities
Specifications"onpage21forvacuumrequirementsandFigure3-5.
DependingupontheconfigurationoftheMarathonExpress,differentialvacuummayneedtobe
suppliedtovarioussealsincludingtheTopLignervacuumalignerandtheVacuumCassette
Elevatorsforproperoperationoftheseunits.Ifdifferentialvacuumisrequireditistakendirectlyoff
oftheroughingvacuumline,nouserconnectionisrequired.
DonotturnonthevacuumconnectionuntilallconnectionstotheMarathonExpressandallinstallationpro-
cedureshavebeencompleted.

Step Action
1.
Connectthefacility’srough-vacuumsystemtotheMarathonExpress.
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Copyright © 2023, Brooks Automation, Inc.
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