Brooks Marathon Express - Page 88

4. Subsystems Marathon Express
Vacuum Systems Part Number: 605914 Rev. B
High Vacuum System
Themodulardesignofthevacuumsystemaccommodatesseveraldifferentbrandsofpumpsfor
highvacuumsystems.TheplumbingmanifoldisterminatedatasingleKF-40connection.The
MarathonExpressdesignwillaccommodateseveraldifferentSEMI-compatibleisolationvalves
(SMC,VAT,HPS).
BackingPump
Highvacuumpumpsrequirebackingvacuumpumpstooperateproperly.TheMarathonExpress
systemsnormallyrequireauser-supplieddrydiaphragmorscrollpumptoprovidethebacking
vacuum.Thisisapumpwithdryworkingchambers,i.e.,thegasesbeingpumpedfromthepump
chamberdonotcomeintocontactwithanylubricant.Backingpumpsareplacedwhereconvenient
bytheuser.
PumpVentValve
Thepumpingsystemincludesvalvestopermitautomaticventingandbrakingofeachturbo
molecularpumpwhenitistobestoppedduringevacuationandventcycles.Thesevalves,each
connecteddirectlytotheventportofitsrespectivepump,arecontrolledbythehostcontroller.
Cryogenicpumpsareequippedwitharegenerationkit,whichcontainsventandroughvacuum
valves.
PumpController
Individualpumpcontrollerssupervisetheoperationofeachmainpump.Eachpumpcontroller
acceptsandexecutespumpingsystemon/offcommandsfromthehostcontroller.
Somemainpumps(typicallycryopumps)requireremotecontrol,whichtypicallycomesfromthe
user’sclustertoolcontroller(CTC).Othermainpumps(someturbopumps)lackintegralpump
controllers.Theirindividualcontrollersarerackmountable.
RoughingPump
TheMarathonExpresssystemsuseasinglemechanicaldrypumpinconjunctionwithstaging
valvestosupporttworoughpumpingprocesses.Atwo-stage,slow/fastroughingprocessisused
ontheLoadLock,andasingle-stagefastroughprocessisusedintheTransportChamber.When
highvacuumpumpsareinstalledonthesystem,thesamedrypumpmaysometimesbeusedasa
backingpump.
RoughVacuumSystem(HighSpeedRough/BaseConfiguration)
Thehighperformancetwo-stageroughvacuumsystemachievesafastrough(LoadLocksand
TransportChamber)at2minutes/100mTorr.TheroughplumbingmanifoldfortheLoadLocksis
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