Brooks Marathon Express - Page 206

10. Troubleshooting Marathon Express
Vacuum System Part Number: 605914 Rev. B
Problem Corrective Action
Vacuumchamberfailstopumpdowninset
time
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Ensurethatthevacuumgaugeiscalibratedandis
functioningproperly.
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Checkforcontaminantsinthechamber.
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Ensurethatthepumpcontrollerisfunctioningproperly.
Resetitifnecessary.RefertothePumpControllerUser
Manual.
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Ensurethattheisolationvalveisfunctioningproperly(air
pressureisokay).
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Checkthelidsealstoensurethattheyarestillinplace,free
ofdebris,andinworkingorder.
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Checkthesealsonallgatevalvesandblankoffstoensure
thattheyarestillinplace,freeofdebris,andinworking
order.
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Performaleakcheckifallabovefails;isolatepossible
leaks.
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