Brooks Marathon Express - Page 7

Brooks Automation
Part Number: 605914 Rev. B
RefrigerantGasses 51
RecyclingandHazardousMaterials 51
MaterialSafetyInformation 53
3.Installation 54
SiteRequirements 54
FloorSpaceandLoading 54
Environmental 55
Facilities 55
UnpackingandInspection 55
ProcedureCategory 58
RequiredToolsandEquipment 58
UnpackingInstructions 58
InstallationProcedure 60
ProcedureCategory 61
RequiredToolsandEquipment 61
RemoveProtectivePackaging 62
RemovingShippingBrackets 62
InstallingtheVacuumCassetteElevators 63
InstallingtheMarathonExpress 63
MountingtheProcessModulestotheMXSystem 66
IntermoduleConnections 67
FacilitiesConnections 69
Electrical 74
EMOCircuit 75
CommunicationsConnections 78
Power-upSequence 79
4.Subsystems 83
SystemOverview 83
TransportChamber 84
TransportChamberLidAssembly 84
LidOperation 84
FrameAssembly 85
PowerDistribution 86
ACPowerDistribution 86
CircuitProtection 87
VacuumSystems 87
PumpingSystem 87
ChamberIsolationValves 89
VentingSystem 89
VacuumMeasurementSystem 90
Gauges 90
VacuumSystemControl 90
PneumaticSystem 90
GasSystem 91
WaterSystem 92
TransportChamberHeatingSystem 92
Copyright © 2023, Brooks Automation, Inc.
7