Brooks Marathon Express - Page 8

Marathon Express
Part Number: 605914 Rev. B
HeaterPowerSupply 93
Heaters 94
TemperatureController 95
ThermalBlankets 96
TransportChamberCoolingSystem 96
ElectricalSystem 97
DeviceNet 98
TopCooler 98
TopLignerVacuumAligner 98
IntegralWaferBufferStation 98
MaterialPresenceSensors 99
MagnaTran7orLEAPVacuumRobot 99
Control/DisplayModule 99
VacuumLoadLocks 100
SVL 100
VCE 101
5.OperationalInterfaces 102
HeaterPowerSupplyRemote 102
ACPowerDistribution 104
PowerConnections 105
ACPowerDistributionCable 106
6.Operation 107
TheoryofOperation 107
StationCoordinateSystem 108
MarathonExpressFramesofReference 110
Robot’sFrameofReference 111
Aligner’sFrameofReference 111
SystemOperationOverview 111
DeterminingMaterialLocations 114
PickandPlaceCommands 114
MaterialPresenceSensing 115
WaferMapping 115
RadialMotionSensors 115
ControlsandIndicators 115
ACPowerDistribution 115
HeaterPowerSupply 116
TemperatureController 118
EthernettoSerialGatewayModule 119
EthernetSwitchModule 120
SafetyInterlocks 121
LidOpen 122
EmergencyOff(EMO)Circuit 122
LidLifterOperation 123
RaisingtheLid 123
LoweringtheLid 124
Control/DisplayModule(CDM)Operation 125
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