Brooks Marathon Express - Page 9

Brooks Automation
Part Number: 605914 Rev. B
DCPowerSupply 125
HeatingSystem 125
PowerSupply 126
Operation 127
StandardOperation 128
TemperatureController 128
WatlowTemperatureControllerOverview 129
HeatingModes 129
HeatingControl 130
WaterCoolingSystems 132
ChamberCoolingSystem 133
PumpCoolingSystem 133
WaferCoolingSystem 133
Pneumatic(AirDistribution)System 134
GasFacilitiesOperation 134
ControlsandIndicators 135
TopCoolerOperation 135
TopLignerVacuumAlignerOperation 135
VacuumSystemOperation 136
InitialConditions 136
ChamberBakeout 136
Start-up 136
ExchangeWafersintheLoadLocks 136
Shutdownfromhighvacuum 137
VentTransportChamber 137
VentLoadLocks 137
VentingtheChambers-ProfiledVent 137
Start-up 138
NormalRunning 139
7.CommandReference 140
8.SystemAlignment 141
Overview 141
ProcedureCategory 142
RequiredToolsandTestEquipment 142
AlignmentStrategy 142
AlignmentOverview 143
AlignmentProcess 144
LeveltheVCEPlatforms 146
LeveltheProcessModulesandDocktotheMarathonExpress 146
AdjusttheRobot’sEndEffectors 146
SystemPreparation 148
InitializingtheVacuumCassetteElevators 149
InitializingtheTopLigner 150
InitializingtheTopCooler 150
InitiatingtheCDM 150
OpeningtheChamberLid 150
Copyright © 2023, Brooks Automation, Inc.
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