Brooks Marathon Express - Page 10

Marathon Express
Part Number: 605914 Rev. B
AlignmentProcedures 151
SettingtheOptionsfortheVacuumRobot 151
TeachtheRobottotheTopLignerVacuumAligner 151
ProcedureCategory 151
RequiredToolsandTestEquipment 152
ConfigurationandAlignmentStrategy 152
TeachtheRobottheAlignerStation 152
TeachtheRobotwiththeTopCooler 154
TeachtheRobottheCoolerStation 155
VacuumCassetteElevatorConfigurationandAlignment 156
ConfigurationandAlignmentStrategy 157
SettheRobottotheVCEWTP 158
AdjusttheLoadLockPlatform 161
SettheLoadLockTandRCoordinates 163
AligntheLoadLock’sSPS 165
TeachtheRobottheIntegralWaferBufferStation 165
Procedure 166
TeachtheRobottheProcessModules 167
Procedure 168
TeachingPan’B’onaDualEnd-EffectorArmSet 169
Fine-TuningtheStationAssignment 170
UsingtheAlignerasaTruePositionReference 170
UsingPhysicalLocationasaTruePositionReference 171
SystemAlignmentCheck-out 171
AlignmentProcedure 172
9.MaintenanceandRepair 174
PreventativeMaintenance 174
Parts 175
PadCleaningProcedure 175
MaintenanceProcedure 176
CleaningProcedure 177
MaintenanceProcedure 178
TopCoolerCoolChuckCleaning 179
MaintenanceProcedure 180
O-RingRemoval/Replacement/Cleaning 181
MaintenanceProcedure 182
VerifyingFlatnessofRobot’sEndEffector 183
MeasurementProcedure 184
AdjustingtheRobot’sEndEffector(s) 185
AdjustmentProcedure 186
RepairPhilosophy 187
RepairProcedures 187
WaferChange-OverProcedure 187
MaintenanceProcedure 189
Removing/ReplacingViewports 189
LidReplacement 192
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