Brooks Marathon Express - Page 11

Brooks Automation
Part Number: 605914 Rev. B
LidLifterReplacement 194
VacuumRobot,Arm,orEndEffectorReplacement 196
PadRemoval/Replacement 199
HeaterCartridgeReplacement 200
TopCoolerPoppetOpen/CloseSensorAdjustment 202
TopLignerSupportPinReplacement 202
IsolationValveReplacement 202
10.Troubleshooting 203
InitialTroubleshooting 203
Interlocks 204
MaterialTransport 204
TopLignerVacuumAligner 204
Pressure/IndicatorSwitch 205
VacuumSystem 205
11.FieldReplaceableUnits 207
MarathonExpress 208
12.Appendices 218
AppendixA:ContactBrooksAutomationTechnicalSupport 219
AppendixB:FactoryDefaultSettings 220
DefaultRobotSettings 220
DefaultVCE6DriveSettings 220
DefaultTopLignerVacuumAlignerSettings 220
AppendixC:StationIdentification 221
AppendixD:DocumentAbbreviations 222
AppendixE:Consumables 223
AppendixF:PackingandShippingInstructions 224
PackingProcedure 226
AppendixG:MaterialSafetyInformation 229
Copyright © 2023, Brooks Automation, Inc.
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