Brooks Marathon Express

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Brooks Automation

Part Number: 605914 Rev. B

Revision History

Revision ECO Date Action Author

A EC146354 6/29/2023 Initialrelease. K.Forscher

B EC146805 7/13/2023

AddedACPowerDistributioninformationtothe

OperationalInterfacesandOperationchapters.

K.Forscher

Main Page

Table of Contents6
Introduction12
System Overview12
Options13
Subsystems13
Supplementary and Related Documentation15
Manual Notation16
Specifications17
Operating Specifications17
Environmental Specifications18
Mechanical Specifications19
Electrical Specifications20
Chamber Heating and Cooling21
Facilities Specifications21
Communications Specifications24
Center of Gravity and Floor Loading25
Site Requirements for Moving the Marathon Express25
Process Module Space Allocation25
Service and Exclusion Zones25
Safety27
Regulatory Compliance and Declaration of Incorporation28
Explanation of Hazards and Alerts29
Safety Text29
Safety Icons29
Signal Words and Color29
Alert Example30
General Safety Considerations31
Illustration of Hazard Locations33
Safety and Identification Labels34
Illustration of Hazard Locations36
Interlocks40
Lockout/Tagout41
Mechanical Hazards42
Lid Lockout/Tagout Procedure43
Electrical Hazards45
Disconnect Devices46
Laser Hazards46
Thermal Hazards47
Vacuum Hazards48
Ergonomics Hazards50
Tip Hazard50
Environmental Information51
Noise Emission51
Vibration51
Refrigerant Gasses51
Recycling and Hazardous Materials51
Material Safety Information53
Installation54
Site Requirements54
Floor Space and Loading54
Environmental55
Facilities55
Unpacking and Inspection55
Procedure Category58
Required Tools and Equipment58
Unpacking Instructions58
Installation Procedure60
Procedure Category61
Required Tools and Equipment61
Remove Protective Packaging62
Removing Shipping Brackets62
Installing the Vacuum Cassette Elevators63
Installing the Marathon Express63
Mounting the Process Modules to the MX System66
Intermodule Connections67
Facilities Connections69
Electrical74
EMO Circuit75
Communications Connections78
Power-Up Sequence79
Subsystems83
System Overview83
Transport Chamber84
Transport Chamber Lid Assembly84
Lid Operation84
Frame Assembly85
Power Distribution86
AC Power Distribution86
Circuit Protection87
Vacuum Systems87
Pumping System87
Chamber Isolation Valves89
Venting System89
Vacuum Measurement System90
Gauges90
Vacuum System Control90
Pneumatic System90
Gas System91
Water System92
Transport Chamber Heating System92
Heater Power Supply93
Heaters94
Temperature Controller95
Thermal Blankets96
Transport Chamber Cooling System96
Electrical System97
Devicenet98
Topcooler98
Topligner Vacuum Aligner98
Integral Wafer Buffer Station98
Material Presence Sensors99
Magnatran 7 or LEAP Vacuum Robot99
Control/Display Module99
Vacuum Load Locks100
Svl100
Vce101
5. Operational Interfaces102
Heater Power Supply Remote102
AC Power Distribution104
Power Connections105
AC Power Distribution Cable106
Operation107
Theory of Operation107
Station Coordinate System108
Marathon Express Frames of Reference110
Robot's Frame of Reference111
Aligner's Frame of Reference111
System Operation Overview111
Determining Material Locations114
Pick and Place Commands114
Material Presence Sensing115
Wafer Mapping115
Radial Motion Sensors115
Controls and Indicators115
AC Power Distribution115
Heater Power Supply116
Temperature Controller118
Ethernet to Serial Gateway Module119
Ethernet Switch Module120
Safety Interlocks121
Lid Open122
Emergency off (EMO) Circuit122
Lid Lifter Operation123
Raising the Lid123
Lowering the Lid124
Control/Display Module (CDM) Operation125
DC Power Supply125
Heating System125
Power Supply126
Operation127
Standard Operation128
Temperature Controller128
Watlow Temperature Controller Overview129
Heating Modes129
Heating Control130
Water Cooling Systems132
Chamber Cooling System133
Pump Cooling System133
Wafer Cooling System133
Pneumatic (Air Distribution) System134
Gas Facilities Operation134
Controls and Indicators135
Topcooler Operation135
Topligner Vacuum Aligner Operation135
Vacuum System Operation136
Initial Conditions136
Chamber Bakeout136
Start-Up136
Exchange Wafers in the Load Locks136
Shut down from High Vacuum137
Vent Transport Chamber137
Vent Load Locks137
Venting the Chambers - Profiled Vent137
Start-Up138
Normal Running139
7. Command Reference140
8. System Alignment141
Overview141
Procedure Category142
Required Tools and Test Equipment142
Alignment Strategy142
Alignment Overview143
Alignment Process144
Level the VCE Platforms146
Level the Process Modules and Dock to the Marathon Express146
Adjust the Robot's End Effectors146
System Preparation148
Initializing the Vacuum Cassette Elevators149
Initializing the Topligner150
Initializing the Topcooler150
Initiating the CDM150
Opening the Chamber Lid150
Alignment Procedures151
Setting the Options for the Vacuum Robot151
Teach the Robot to the Topligner Vacuum Aligner151
Procedure Category151
Required Tools and Test Equipment152
Configuration and Alignment Strategy152
Teach the Robot the Aligner Station152
Teach the Robot with the Topcooler154
Teach the Robot the Cooler Station155
Vacuum Cassette Elevator Configuration and Alignment156
Configuration and Alignment Strategy157
Set the Robot to the VCE WTP158
Adjust the Load Lock Platform161
Set the Load Lock T and R Coordinates163
Align the Load Lock's SPS165
Teach the Robot the Integral Wafer Buffer Station165
Procedure166
Teach the Robot the Process Modules167
Procedure168
Teaching Pan 'B' on a Dual End-Effector Arm Set169
Fine-Tuning the Station Assignment170
Using the Aligner as a True Position Reference170
Using Physical Location as a True Position Reference171
System Alignment Check-Out171
Alignment Procedure172
9. Maintenance and Repair174
Preventative Maintenance174
Parts175
Pad Cleaning Procedure175
Maintenance Procedure176
Cleaning Procedure177
Maintenance Procedure178
Topcooler Cool Chuck Cleaning179
Maintenance Procedure180
O-Ring Removal/Replacement/Cleaning181
Maintenance Procedure182
Verifying Flatness of Robot's End Effector183
Measurement Procedure184
Adjusting the Robot's End Effector(S)185
Adjustment Procedure186
Repair Philosophy187
Repair Procedures187
Wafer Change-Over Procedure187
Maintenance Procedure189
Removing/Replacing Viewports189
Lid Replacement192
Lid Lifter Replacement194
Vacuum Robot, Arm, or End Effector Replacement196
Pad Removal/Replacement199
Heater Cartridge Replacement200
Topcooler Poppet Open/Close Sensor Adjustment202
Topligner Support Pin Replacement202
Isolation Valve Replacement202
10. Troubleshooting203
Initial Troubleshooting203
Interlocks204
Material Transport204
Topligner Vacuum Aligner204
Pressure/Indicator Switch205
Vacuum System205
Field Replaceable Units Marathon Express208
12. Appendices218
Appendix A: Contact Brooks Automation Technical Support219
Appendix B: Factory Default Settings220
Default Robot Settings220
Default VCE 6 Drive Settings220
Default Topligner Vacuum Aligner Settings220
Appendix C: Station Identification221
Appendix D: Document Abbreviations222
Appendix E: Consumables223
Appendix F: Packing and Shipping Instructions224
Packing Procedure226
Appendix G: Material Safety Information229

Brooks Marathon Express - Page 5

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