Brooks Marathon Express - Page 173

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B System Alignment Check-out
Step Action
5.
Usingtherobot'sCDM,transfereachofthewafersinthecassettethroughoutthesystem.
NOTE: Observethewafertransferateachstation.Ifanywaferslidingorcontactoccursreteachthat
station.
a. PICKawaferfromtheVCE.
b. PLACEitintothefirstProcessModule.
c. PICKitfromtheProcessModuleandPLACEittothenextProcessModule.
d. TransferthewaferthroughtheremainingProcessModules,Aligners,CoolStations,and
Buffers.
e. PLACEthewaferintotheemptycassette.
f. Continueuntilallwafershavebeentransferredsuccessfully.
6.
Repeattheproceduretotransferthewafersbacktotheiroriginalcassette.
Copyright © 2023, Brooks Automation, Inc.
173