Brooks Marathon Express - Page 65

Brooks Automation 3. Installation
Part Number: 605914 Rev. B Installation Procedure
Step Action
3.
TheMaterialTransportPlane(MTP)canbeestablishedattheSEMIMESCheightof1100mm(43.31
in)perSEMIE21bysettingthedistancefromthescribemarkonthesideofthechambertothefloorat
1100mmasshowninFigure3-3.Alternately,setthecenterofamaterialtransferslottothefloorat
1090.5mm,whichwillsettheMTPat1100.0mm.

Figure 3-3: Setting the Material Transport Plane
4.
LeveltheMXsystemusinganI-beamlevelplacedalongthechamberbyadjustingeachfootas
necessary.
NOTE: Whenadjustingtheheightofthetransportchamberorlevelingthechamber,ensurethatitis
notallowedto“twist”.Thiscoulddamagethechamberorframe.
5.
VerifytheWTPheightfromthefloortothecenterofeachvacuumfacetalignmentpin.

Copyright © 2023, Brooks Automation, Inc.
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