Brooks Marathon Express - Vacuum Cassette Elevator FRUs

Brooks Automation 11. Field Replaceable Units
Part Number: 605914 Rev. B Marathon Express
Figure 11-8: Vacuum Cassette Elevator FRUs
Number Description
1
ASSY,VCE-6,LH,FW,AM350,
POSPDR,NIATMLDSTA
ASSY,VCE-6,LH,FW,AM350,
POSPDR,NICTA
ASSY,VCE-6,LH,FW,AM350,
POSPDR,NISTA
2
ASSY,VCE-6,RH,FW,AM350,
POSPDR,NIATMLDSTA
ASSY,VCE-6,RH,FW,AM350,
POSPDR,NICTA
ASSY,VCE-6,RH,FW,AM350,
POSPDR,NISTA
3
ASSY,DRIVE,BELLOWSAM350,
CEMARK,VCE-6
ASSY,DRIVE,BELLOWS,
INCONEL,CEMARK,VCE-6
ASSY,DRIVE,LIPSEAL,CEMARK,
VCE-6
-
ASSY,PCB,.09THK,MCC2A,
VCE6
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