Brooks Marathon Express - Page 216

11. Field Replaceable Units Marathon Express
Marathon Express Part Number: 605914 Rev. B
Figure 11-7: TopCooler FRUs
Number Description
1
ASSY,TOPCOOLER,QUARTZ,
MX800
2 ASSY,POPPET,MX,150-200MM
3
WELDMENT,BELLOWS,DROP-IN
COOLER
4
O-RING,VITON,83/4"IDX9"ODX
1/8"W
5
ASSY,COOLINGCHUCK,
200/150MM

216
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