Brooks Marathon Express - Page 215

Brooks Automation 11. Field Replaceable Units
Part Number: 605914 Rev. B Marathon Express
Figure 11-6: Vacuum Aligner FRUs
Number Description
1 ASSY,ALIGNERW/OCHUCK
2
ASSY,ALIGNERELECTRONICS
MODULEW/DC-DCCNVRTR
3 ASSY,LED/OPTIC
4
ASSY,8"CHUCK
ASSY,UNIVERSALCHUCK,4-8",
KALREZPINS
ASSY,UNIVERSALCHUCK,4"-8",
QUARTZPINS
5 ASSY,CCD
6 ASSY,WAFERROTATEMODULE

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