ii
(Not Assigned)..........................................................................................................................................C-25
(Not Assigned)..........................................................................................................................................C-26
(Not Assigned)..........................................................................................................................................C-27
(Not Assigned)..........................................................................................................................................C-28
(Not Assigned)..........................................................................................................................................C-29
(Not Assigned)..........................................................................................................................................C-30
X-axis Sensor P.C. Board.........................................................................................................................C-31
Y-axis Sensor P.C. Board.........................................................................................................................C-32
Z-axis Sensor P.C. Board .........................................................................................................................C-33
Touch Sensor P.C. Board .........................................................................................................................C-34
FP5 DC5 Circuit Diagram ........................................................................................................................C-35
Trans-Box for Domestic...........................................................................................................................C-36
Trans-Box for Export................................................................................................................................C-37
Control Box A (2H/6T) ............................................................................................................................C-38
(Not Assigned)..........................................................................................................................................C-39
Control Box A (2H/6TM).........................................................................................................................C-40
Control Box B...........................................................................................................................................C-41
Control Box C...........................................................................................................................................C-42
Operation Panel ........................................................................................................................................C-43
(Not Assigned)..........................................................................................................................................C-44
Operation Panel (2H/6T) ..........................................................................................................................C-45
Operation Panel (2H/6TM).......................................................................................................................C-46
DC Power P.C. Board...............................................................................................................................C-47
Main CPU Board......................................................................................................................................C-48
Input/Output P.C. Board...........................................................................................................................C-49
(Not Assigned)..........................................................................................................................................C-50
SubCPUBoard(X,Y,Z,
θ
).....................................................................................................................C-51
Driver P.C. Board.....................................................................................................................................C-52
D. MAINTENANCE
1. Maintenance and Inspection ...................................................................................................................D-1
E. CHECKING PROCEDURES FOR TROUBLESHOOTING
1. Power....................................................................................................................................................E-1
2. Data Setting Operation .........................................................................................................................E-5
3. Manual Operation.................................................................................................................................E-7
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