iii
4. Setting-up Operation...........................................................................................................................E-11
5. Semi/Fully Auto Operation.................................................................................................................E-15
6. Driver Control Circuit Board..............................................................................................................E-17
7. Driver..................................................................................................................................................E-19
8. Inverter ...............................................................................................................................................E-21
9. Self-diagnostics ..................................................................................................................................E-30
10. Inverter Alarm Resetting ....................................................................................................................E-35
F. ILLUSTRATIONS AND PARTS LIST
Exploded View of Main Body (A) ............................................................................................................. F-1
Exploded View of Main Body (B).............................................................................................................. F-2
Exploded View of X-axis (90° Theta)..................................................................................................... F-3A
Exploded View of X-axis (Manual Theta) (MODEL DAD-2H/6TM).....................................................F-3B
Exploded View of X-axis (360° Theta)....................................................................................................F-3C
Exploded View of Y-axis ........................................................................................................................... F-4
Exploded View of Z-axis............................................................................................................................ F-5
Exploded View of Piping (A)..................................................................................................................... F-6
Exploded View of Piping (B)..................................................................................................................... F-7
(Not Assigned)............................................................................................................................................F-8
(Not Assigned)............................................................................................................................................F-9
G. REGULAR INSPECTIONS
1. Daily Inspection, Maintenance and Adjustment.....................................................................................G-1
2. Weekly Inspection, Maintenance and Adjustment .................................................................................G-1
3. Monthly Inspection, Maintenance and Adjustment................................................................................G-2
4. Spindle Inspection ..................................................................................................................................G-2
5. I/O Circuit Board Jumper Setup Procedure............................................................................................G-3
H. CAMERA HEAD MONITOR TV
1. General ...................................................................................................................................................H-1
2. Features...................................................................................................................................................H-1
3. Composition of Equipment.....................................................................................................................H-2
4. Specifications..........................................................................................................................................H-2
5. Connections............................................................................................................................................H-4
6. Operating Procedures .............................................................................................................................H-4
J. MICROSCOPE MODEL DS
1. Specifications...........................................................................................................................................J-1
2. Adjustment and Repair............................................................................................................................J-1
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