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EBARA A30W - User Manual

EBARA A30W
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Doc. No. 7313-L4602B Rev. 3B
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
A70W (A70W-S, A70W-C)
A30W (A30W-S, A30W-C)
A25S (A25S-S)
A10S (A10S-S)
A07V (A07V-S)
Distribute this Instruction Manual to all end user
personnel operating the equipment.
ISSUED BY PRECISION MACHINERY GROUP

Questions and Answers

  • J
    jordan00Sep 23, 2025
    What to do if the emergency stop switch is activated on my EBARA A30W Water Pump?
    • B
      Brandi SimsSep 23, 2025
      If the emergency stop switch is activated on your EBARA Water Pump, check that pump can be operated and turn the button head to reset.
  • M
    Michael RuizAug 23, 2025
    What to do if I see ALARM: WATER FLOW LOW on my EBARA Water Pump?
    • F
      fhopkinsAug 25, 2025
      If you see the ALARM: WATER FLOW LOW ##.# on your EBARA Water Pump, it could be due to several reasons: the coupler might be disconnected (connect it), the pressure may not be sufficient (apply sufficient pressure), the source valve could be closed (open the valve), the water piping might be clogged (clean or replace it), there could be leaks in the water piping (check the fittings), the instruments might be in failure (replace instruments), or the inlet/outlet might be reversed (connect correctly).
  • M
    Matthew MorrisAug 25, 2025
    How to fix abnormal noise and excessive vibration in EBARA A30W Water Pump?
    • E
      Edwin GallagherAug 26, 2025
      If you are experiencing Abnormal noise or Excessive vibration with your EBARA Water Pump, it could be due to several reasons. The adjuster foot may not be lowered, so properly set all adjuster feet. The cover might be in contact with other items, so remove objects from the cover. The cover screws could be loose, so tighten the mounting screws. Also, a pump part could be damaged, so replace or overhaul the pump if needed.
  • D
    Dustin CharlesAug 26, 2025
    Why does the power LED not come on for my EBARA A30W Water Pump?
    • S
      Stacy TorresAug 27, 2025
      If the Power LED does not come on for your EBARA Water Pump, it could be due to no power supply to the pump (check the power supply), the connector not being connected (connect the power connector), or the ELB not being ON (switch ELB ON).
  • R
    regina14Aug 27, 2025
    What causes ALARM: CASING TEMP HIGH on my EBARA A30W?
    • C
      Christopher LittleAug 27, 2025
      If you see ALARM: CASING TEMP HIGH ##.# on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), insufficient duct ventilation (ventilate sufficiently), a byproduct clog (replace or overhaul pump), or cooling water decrease (increase water slowly).
  • D
    Dustin JohnsSep 16, 2025
    What to do if ALARM: PUMP BOX TEMP HIGH appears on my EBARA A30W?
    • M
      matthew18Sep 16, 2025
      If you see ALARM: PUMP BOX TEMP HIGH on your EBARA Water Pump, it might be because duct ventilation is not sufficient (ventilate sufficiently) or cooling water decrease (increase water).
  • L
    lukebairdSep 13, 2025
    Why is the LCD display abnormal on my EBARA A30W?
    • S
      Sandra CrawfordSep 13, 2025
      If nothing appears on the LCD or the display is abnormal on your EBARA Water Pump, it could be because the ELB is not ON (switch ELB ON) or the instruments are in failure (replace instruments).
  • M
    mallory97Sep 14, 2025
    What causes ALARM: BP-GEAR OIL LEVEL LOW on my EBARA A30W Water Pump?
    • M
      Michael PowellSep 14, 2025
      If you see ALARM: BP-GEAR OIL LEVEL LOW or ALARM: BP-MOTOR on your EBARA Water Pump, it could be due to decrease of oil (fill the lubricating oil), insufficient sealing N 2 (check sealing N ALARM 2), or the pump is inclined (level the pump with adjuster feet).
  • W
    William MillerSep 5, 2025
    What causes TRIP: BP/MP MOTOR OVERLOAD on my EBARA Water Pump?
    • J
      Jacob WagnerSep 5, 2025
      If you see TRIP: BP MOTOR OVERLOAD or TRIP: MP MOTOR OVERLOAD on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), byproduct clog (replace or overhaul pump), object ingestion (replace or overhaul pump), instruments are in failure (replace instruments), or power supply failure (check power supply).
  • B
    Brandon CochranSep 3, 2025
    What does ALARM: BP/MP MOTOR CURRENT HIGH mean on my EBARA A30W?
    • K
      Kevin BradleySep 3, 2025
      If you see ALARM: BP MOTOR CURRENT HIGH##.# or ALARM: MP MOTOR CURRENT HIGH##.# on your EBARA Water Pump, it could be due to exhaust pressure rises (check exhaust piping), rotor is in contact (byproducts) (substance plunge) (cooling water decrease) (gear or bearing damage) (replace or overhaul pump), instruments are in failure (replace instruments), or power supply failure (check power supply).

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels: DANGER, WARNING, CAUTION for safe operation.

Important Precautions

Lists critical safety measures for operation, wiring, and maintenance.

Safety Warning Labels

Details specific warning labels on pump covers and their meanings.

Installation

Piping Connections

Guides vacuum, exhaust, cooling water, and N2 gas piping connections.

Electrical Wiring

Details power supply and control signal wiring procedures and specifications.

Operation

Maintenance and Overhaul

Troubleshooting

Basic Troubleshooting

Lists common abnormal symptoms and their corrective actions.

ALARM Conditions

Details alarm displays, symptoms, check items, and corrective actions.

TRIP Conditions

Outlines trip conditions, symptoms, check items, and corrective actions.

Appendix 2: Safety Interlocks

Appendix 3: EBARA Dry Pumps and SEMI S2-93 A (S2-0200)

Appendix 4: Leak Check Procedure

EBARA A30W Specifications

General IconGeneral
BrandEBARA
ModelA30W
CategoryWater Pump
LanguageEnglish

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