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EBARA A30W - User Manual

EBARA A30W
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Doc. No. 7313-L4602B Rev. 3B
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
A70W (A70W-S, A70W-C)
A30W (A30W-S, A30W-C)
A25S (A25S-S)
A10S (A10S-S)
A07V (A07V-S)
Distribute this Instruction Manual to all end user
personnel operating the equipment.
ISSUED BY PRECISION MACHINERY GROUP

Questions and Answers

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels: DANGER, WARNING, CAUTION for safe operation.

Important Precautions

Lists critical safety measures for operation, wiring, and maintenance.

Safety Warning Labels

Details specific warning labels on pump covers and their meanings.

Installation

Piping Connections

Guides vacuum, exhaust, cooling water, and N2 gas piping connections.

Electrical Wiring

Details power supply and control signal wiring procedures and specifications.

Operation

Maintenance and Overhaul

Troubleshooting

Basic Troubleshooting

Lists common abnormal symptoms and their corrective actions.

ALARM Conditions

Details alarm displays, symptoms, check items, and corrective actions.

TRIP Conditions

Outlines trip conditions, symptoms, check items, and corrective actions.

Appendix 2: Safety Interlocks

Appendix 3: EBARA Dry Pumps and SEMI S2-93 A (S2-0200)

Appendix 4: Leak Check Procedure

EBARA A30W Specifications

General IconGeneral
BrandEBARA
ModelA30W
CategoryWater Pump
LanguageEnglish

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