To Next PageTo Next PageWhat to do if the emergency stop switch is activated on my EBARA Water Pump?
If the emergency stop switch is activated on your EBARA Water Pump, check that pump can be operated and turn the button head to reset.
What to do if I see ALARM: WATER FLOW LOW on my EBARA Water Pump?
If you see the ALARM: WATER FLOW LOW ##.# on your EBARA Water Pump, it could be due to several reasons: the coupler might be disconnected (connect it), the pressure may not be sufficient (apply sufficient pressure), the source valve could be closed (open the valve), the water piping might be clogged (clean or replace it), there could be leaks in the water piping (check the fittings), the instruments might be in failure (replace instruments), or the inlet/outlet might be reversed (connect correctly).
How to fix abnormal noise and excessive vibration in EBARA Water Pump?
If you are experiencing Abnormal noise or Excessive vibration with your EBARA Water Pump, it could be due to several reasons. The adjuster foot may not be lowered, so properly set all adjuster feet. The cover might be in contact with other items, so remove objects from the cover. The cover screws could be loose, so tighten the mounting screws. Also, a pump part could be damaged, so replace or overhaul the pump if needed.
Why does the power LED not come on for my EBARA A70W?
If the Power LED does not come on for your EBARA Water Pump, it could be due to no power supply to the pump (check the power supply), the connector not being connected (connect the power connector), or the ELB not being ON (switch ELB ON).
What causes ALARM: CASING TEMP HIGH on my EBARA A70W Water Pump?
If you see ALARM: CASING TEMP HIGH ##.# on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), insufficient duct ventilation (ventilate sufficiently), a byproduct clog (replace or overhaul pump), or cooling water decrease (increase water slowly).
What to do if ALARM: PUMP BOX TEMP HIGH appears on my EBARA A70W Water Pump?
If you see ALARM: PUMP BOX TEMP HIGH on your EBARA Water Pump, it might be because duct ventilation is not sufficient (ventilate sufficiently) or cooling water decrease (increase water).
Why is the LCD display abnormal on my EBARA Water Pump?
If nothing appears on the LCD or the display is abnormal on your EBARA Water Pump, it could be because the ELB is not ON (switch ELB ON) or the instruments are in failure (replace instruments).
What causes ALARM: BP-GEAR OIL LEVEL LOW on my EBARA A70W Water Pump?
If you see ALARM: BP-GEAR OIL LEVEL LOW or ALARM: BP-MOTOR on your EBARA Water Pump, it could be due to decrease of oil (fill the lubricating oil), insufficient sealing N 2 (check sealing N ALARM 2), or the pump is inclined (level the pump with adjuster feet).
What causes TRIP: BP/MP MOTOR OVERLOAD on my EBARA A70W Water Pump?
If you see TRIP: BP MOTOR OVERLOAD or TRIP: MP MOTOR OVERLOAD on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), byproduct clog (replace or overhaul pump), object ingestion (replace or overhaul pump), instruments are in failure (replace instruments), or power supply failure (check power supply).
What does ALARM: BP/MP MOTOR CURRENT HIGH mean on my EBARA A70W Water Pump?
If you see ALARM: BP MOTOR CURRENT HIGH##.# or ALARM: MP MOTOR CURRENT HIGH##.# on your EBARA Water Pump, it could be due to exhaust pressure rises (check exhaust piping), rotor is in contact (byproducts) (substance plunge) (cooling water decrease) (gear or bearing damage) (replace or overhaul pump), instruments are in failure (replace instruments), or power supply failure (check power supply).
Overview of the A Series dry vacuum pump features and components.
Describes the built-in sensing unit and control circuit for reliability and safety.
Instructions and precautions for safely moving the vacuum pump unit.
Reference to tables and figures for detailed specifications, size, and pump performance.
Guidelines for selecting a suitable indoor installation location, considering environment and ventilation.
Procedures for connecting vacuum, exhaust, cooling water, and N2 gas piping.
Instructions for connecting power supply and control signal wiring, including pin assignments.
How to set dipswitches on the control panel for various operating modes and configurations.
Steps to take before starting the pump, including checking cooling water and N2 gas.
Guidelines for operating the pump, including safety warnings and modes.
Periodic checks to ensure the pump is operating under normal conditions without alarms.
Procedures for maintaining vacuum and exhaust piping, including purging and leak checks.
Instructions for checking, filling, and disposing of lubricant oil.
List of consumable and spare parts required for pump maintenance and operation.
Guidance on performing overhaul work, recommending trained personnel.
Common abnormal symptoms and their corrective actions for basic operational issues.
Troubleshooting guide for various ALARM conditions and their causes.
Troubleshooting guide for various TRIP conditions and their corrective actions.
Troubleshooting specific TRIP conditions related to optional features or specific events.
Contact information for EBARA Technologies, Inc. in North America.
Contact information for EBARA Corporation and its subsidiaries in Asia.
Contact information for EBARA Corporation branches in Europe.
Safety data sheet for the vacuum pump oil used in the equipment.
Explanation of standard and optional safety interlocks that shut down the pump upon detecting unsafe conditions.
Discussion on EBARA dry pumps and compliance with SEMI health and safety guidelines.
General procedure for performing leak checks on the system and pump.
Regulations and procedures for shipping pumps for rebuild in the United States.
General| Brand | EBARA |
|---|---|
| Model | A70W |
| Category | Water Pump |
| Language | English |
