What should I do if TRIP: PHASE ERROR appears on my EBARA A70W?
If you see TRIP: PHASE ERROR on your EBARA Water Pump, it could be due to negative phase (incorrect wiring Wire R/S/T/E correctly), instruments are in failure (replace instruments), or open phase (incorrect wiring Check power supply).
What does ALARM: SEAL N2 FLOW LOW mean on my EBARA Water Pump?
If you see ALARM: SEAL N2 FLOW LOW or ALARM: DIL. N2 FLOW LOW ##.# (with dilution mode) or ALARM: DIL. N2. VALVE OPEN (without dilution mode) on your EBARA Water Pump, it could be due to N port is not connected 2 (connect N pipe fitting 2), primary pressure is insufficient (apply sufficient pressure), regulator setting low (increase pressure setting), N piping is clogged 2 (replace N piping 2), N piping leaks 2 (check the fittings), instruments are in failure (replace instruments), selector valve is closed *1 (open the valve Set to zero dilution mode”), or selector valve is open *2 (close the valve Set to “standard mode”).
Why is the circuit breaker activated on my EBARA Water Pump?
If the circuit breaker is activated (leakage detector is on) for your EBARA Water Pump, this could be due to incorrect wiring, a ground fault, or a short circuit. You should check the wiring. If that's not the cause, the pump may need to be replaced or overhauled.
Why does the BP not start on my EBARA A70W Water Pump?
If the BP does not start on your EBARA Water Pump, it could be due to leakage on vacuum piping (check piping), MP insufficient vacuum (replace or overhaul), BP start signal is not applied (apply BP start signal), or instrument failure (replace instruments).
What does ALARM: BP/MP MOTOR CURRENT HIGH mean on my EBARA A70W Water Pump?
If you see ALARM: BP MOTOR CURRENT HIGH##.# or ALARM: MP MOTOR CURRENT HIGH##.# on your EBARA Water Pump, it could be due to exhaust pressure rises (check exhaust piping), rotor is in contact (byproducts) (substance plunge) (cooling water decrease) (gear or bearing damage) (replace or overhaul pump), instruments are in failure (replace instruments), or power supply failure (check power supply).
What to do if MP does not start when applying START signal to EBARA A70W Water Pump?
If the MP does not start when applying a START signal to your EBARA Water Pump, it could be because the mode is set to “Local” (set switch to “Remote” mode), the mode is set to “Alternate” (Pump jogs) (apply “Alternate” start signal Set to “Momentary” mode), or the instruments are in failure (replace instruments).
What causes vacuum pressure increase in EBARA A70W?
If you are experiencing Vacuum pressure increase with your EBARA Water Pump, it could be due to byproducts settled in piping (clean up piping), N pressure setting is high (set pressure for correct value), leakage from vacuum piping (check piping), or byproducts settled in pump (replace or overhaul pump).
Why won't the MP start when I press the START button on my EBARA A70W Water Pump?
If the MP does not start when pressing the START button on your EBARA Water Pump, it could be because the mode is set to “Remote” (set switch to “Local” mode), start-up conditions are not satisfied (“STARTFAIL” is displayed) (satisfy all start-up conditions), or the instruments are in failure (replace instruments).
What should I do if TRIP: CASING TEMP H.HIGH appears on my EBARA Water Pump?
If you see TRIP: CASING TEMP H.HIGH on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), cooling water decrease (increase water slowly), byproduct clog (replace or overhaul pump), or insufficient duct ventilation (ventilate sufficiently).
What causes ALARM: CASING TEMP HIGH on my EBARA A70W Water Pump?
If you see ALARM: CASING TEMP HIGH ##.# on your EBARA Water Pump, it could be due to exhaust pressure rise (check exhaust piping), insufficient duct ventilation (ventilate sufficiently), a byproduct clog (replace or overhaul pump), or cooling water decrease (increase water slowly).
Overview of the A Series dry vacuum pump features and components.
Describes the built-in sensing unit and control circuit for reliability and safety.
Instructions and precautions for safely moving the vacuum pump unit.
Reference to tables and figures for detailed specifications, size, and pump performance.
Guidelines for selecting a suitable indoor installation location, considering environment and ventilation.
Procedures for connecting vacuum, exhaust, cooling water, and N2 gas piping.
Instructions for connecting power supply and control signal wiring, including pin assignments.
How to set dipswitches on the control panel for various operating modes and configurations.
Steps to take before starting the pump, including checking cooling water and N2 gas.
Guidelines for operating the pump, including safety warnings and modes.
Periodic checks to ensure the pump is operating under normal conditions without alarms.
Procedures for maintaining vacuum and exhaust piping, including purging and leak checks.
Instructions for checking, filling, and disposing of lubricant oil.
List of consumable and spare parts required for pump maintenance and operation.
Guidance on performing overhaul work, recommending trained personnel.
Common abnormal symptoms and their corrective actions for basic operational issues.
Troubleshooting guide for various ALARM conditions and their causes.
Troubleshooting guide for various TRIP conditions and their corrective actions.
Troubleshooting specific TRIP conditions related to optional features or specific events.
Contact information for EBARA Technologies, Inc. in North America.
Contact information for EBARA Corporation and its subsidiaries in Asia.
Contact information for EBARA Corporation branches in Europe.
Safety data sheet for the vacuum pump oil used in the equipment.
Explanation of standard and optional safety interlocks that shut down the pump upon detecting unsafe conditions.
Discussion on EBARA dry pumps and compliance with SEMI health and safety guidelines.
General procedure for performing leak checks on the system and pump.
Regulations and procedures for shipping pumps for rebuild in the United States.
General| Brand | EBARA |
|---|---|
| Model | A70W |
| Category | Water Pump |
| Language | English |
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