A373-10-880 Issue R
Page ii © Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
5.5 Inspect and clean the inlet-filter .....................................................................................25
5.6 Clean the gas-ballast filter ............................................................................................26
5.7 Clean the motor fan-cover and enclosure ..........................................................................26
5.8 Clean and overhaul the pump .........................................................................................26
5.9 Replace the run capacitor and test the motor .....................................................................27
5.10 Fit new blades ...........................................................................................................27
5.11 Fault finding .............................................................................................................27
5.11.1 Introduction .............................................................................................................27
5.11.2 The pump has failed to start ..........................................................................................27
5.11.3 The pump fail to achieve specified performance (failure to reach ultimate vacuum) ......................28
5.11.4 The pump is noisy .......................................................................................................28
5.11.5 The pump surface temperature is above 100°C ...................................................................28
5.11.6 The vacuum is not maintained after the pump is switched off ..................................................29
5.11.7 The pumping speed is poor ............................................................................................29
5.11.8 There is an external oil leak ..........................................................................................29
6 Storage and disposal ........................................................................... 31
6.1 Storage ...................................................................................................................31
6.2 Disposal ...................................................................................................................31
7 Service, spares and accessories .............................................................. 33
7.1 Introduction .............................................................................................................33
7.2 Service ....................................................................................................................33
7.3 Spares .....................................................................................................................33
7.4 Capacitor selection table ..............................................................................................34
7.5 Accessories ...............................................................................................................35
7.5.1 Introduction .............................................................................................................35
7.5.2 Inlet catchpot ...........................................................................................................35
7.5.3 Inlet dust filter ..........................................................................................................35
7.5.4 Inlet desiccant trap .....................................................................................................35
7.5.5 Inlet chemical trap .....................................................................................................35
7.5.6 Outlet mist filter ........................................................................................................35
7.5.7 Solenoid operated pipeline valve ....................................................................................37
7.5.8 Foreline trap .............................................................................................................37
7.5.9 Vibration isolators ......................................................................................................37
7.5.10 Oil drain extension .....................................................................................................37
7.5.11 Pump inlet adaptor .....................................................................................................37
7.5.12 Flexible bellows .........................................................................................................37
7.5.13 Pump outlet adaptor ...................................................................................................37
7.5.14 Gas ballast banjo/elbow assembly ...................................................................................37
7.5.15 Gas ballast valve ........................................................................................................37
8 PFPE-prepared EM pumps ..................................................................... 39
8.1 Introduction .............................................................................................................39
8.2 Installation ...............................................................................................................39
8.3 Operation ................................................................................................................39
8.4 Maintenance .............................................................................................................39
For return of equipment, complete the HS Forms at the end of this manual.