Edwards STP-A1303 Series User Manual

MT-00E-001-M
D
Applicable Models:
◼ STP-301/451 series
◼ STP-L301/L451 series
◼ STP-603/1003 series
◼ STP-H301/H451 series
◼ STP-H803/H1303 series
◼ STP-A803/A1303 series
◼ STP-A1603 series
◼ STP-A2203 series
◼ STP-A2503/A3003 series
◼ STP-A2803/A3503 series
◼ STP-F2203 series
◼ STP-XH2603P/XH3203P series
◼ STP-XA2703/XA3203 series
◼ STP-XA4503 series
◼ STP-XW3503 series
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.08

Edwards STP-A1303 Series Specifications

General

Brand	Edwards
Model	STP-A1303 Series
Category	Water Pump
Language	English

Summary

1 INTRODUCTION

Safety Information and Warning Labels

Explains WARNING/CAUTION definitions and displays IEC warning symbols.

1.4 Safe Operation Precautions

1.8 Temperature Management System (TMS)

2 INSTALLATION OF THE STP PUMP

2.1 Precautions Before Installation

Lists essential precautions and conditions to consider before proceeding with pump installation.

2.1.1 Operating Environment Requirements

2.1.2 Installation Area Considerations

2.3 How to Install the STP Pump

2.3.1 Cleaning the Seal

2.3.3 Secure the STP Pump

2.3.4 Vacuum Piping Precautions

Covers essential precautions and best practices for vacuum piping connections.

2.3.5 Vacuum Piping Method

3 INSTALLATION OF THE STP CONTROL UNIT

3.1 STP Control Unit Overview

3.2 Cable Connection

3.3 Connecting the Cables

4 OPERATION

4.1 Pre-Operation Checks and Tuning

4.2 Pump Operation and Indicators

4.3 Gas Pumping and Safety

4.4 Cooling the STP Pump

4.5 Baking the STP Pump

4.6 Using the TMS Unit

5 SAFETY FUNCTIONS

5.1 Safety Functions Overview

Lists and describes various safety functions built into the STP pump for detecting abnormalities.

5.1.1 Abnormal States and Overloads

5.1.2 Control Unit and TMS Errors

6 MAINTENANCE AND INSPECTION

6.1 Maintenance and Inspection Precautions

Provides essential safety warnings and precautions before performing any maintenance or inspection.

6.2 Cleaning Procedures

6.3 Deposit Inspection and Management

6.4 Maintenance Schedules and Parts

6.4.3 Recommended Maintenance Intervals for Main Parts