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Edwards STP-iXA3306BV User Manual

Edwards STP-iXA3306BV
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MT-82E-001-H
STP Series Turbomolecular Pumps
STP-iXA3306 Series
Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.

Table of Contents

Questions and Answers:

Edwards STP-iXA3306BV Specifications

General IconGeneral
BrandEdwards
ModelSTP-iXA3306BV
CategoryWater Pump
LanguageEnglish

Summary

1 Introduction

1.4 Safe Operation Precautions

Provides warnings and cautions for safe operation, including gas usage.

1.5 Maintenance and Inspection Precautions

Precautions for maintenance and inspection, referencing specific sections.

1.7 Operation Principle

Explains the working principle of the turbomolecular pump and its features.

3 Installation of the STP Pump

3.1 Installation Precautions

Emphasizes that only skilled personnel should perform installation, operation, and maintenance.

3.1.1 Operating Environment

Details environmental requirements for installation, including temperature and humidity.

3.1.2 Installation Area

Specifies the necessary space around the pump for maintenance and cable connections.

3.1.3 Bench Requirements

Covers requirements for preparing a secure bench for the STP pump installation.

3.2 Unpacking Procedures

Instructions for checking and unpacking the STP pump, emphasizing its weight and lifting.

3.4 How to Install the STP Pump

Provides instructions and warnings for installing the STP pump into vacuum equipment.

3.4.1 Cleaning the Seal

Details procedures for cleaning pump seals and handling waste safely.

3.4.2 STP Pump Installation Positions

Describes permissible installation orientations (vertical, horizontal, etc.) and recommendations.

3.4.3 Secure the STP Pump

Explains how to securely mount the STP pump, considering torque and electrical resistance.

3.4.5 Power Cable

Instructions for connecting the power cable, including warnings and specifications.

3.4.6 How to Connect the Power Cable

Detailed steps and cautions for connecting the power cable to the pump.

3.5 Precautions of Vacuum Piping

Guidelines for proper vacuum piping to ensure optimal pump performance and prevent damage.

4 Operation

4.1 Gas Pumping, Cooling, and Baking

Covers essential steps for gas pumping, cooling, and baking the STP pump.

4.2 Cooling the STP Pump

Procedures and requirements for cooling the STP pump during operation or baking.

4.4 Before Starting the STP Pump

Checks and confirmations required before starting the STP pump.

4.6.2 Starting and Stopping the STP Pump

Details starting and stopping procedures using contact or voltage input methods.

5 Serial Communication Protocol

7 Safety Functions

7.1 General Safety Functions

Overview of safety functions for detecting abnormalities and errors in the STP pump.

7.1.1 Power Failure

Details pump behavior and indications during a power failure or recovery.

7.2 WARNING Function

Explains the WARNING function, indicated by the FAILURE LED (orange), and its priority levels.

7.5 Troubleshooting After Failure

Guides on how to troubleshoot after a failure, including power failure and other abnormalities.

7.6 Troubleshooting by FAILURE LED Indication

Details troubleshooting steps based on red and green FAILURE LED indications.

8 Maintenance and Inspection

8.1 Maintenance and Inspection

General precautions and warnings for performing maintenance and inspection safely.

8.4 Maintenance

Covers overhaul intervals and standard replacement parts for pump maintenance.

8.5 Transporting for Repair or Overhaul

Procedures and precautions for safely transporting the STP pump for repair or overhaul.