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STP-iX457 Series
Edwards STP-iX457 Series User Manual
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MT-86E-001-F
STP Series Turb
omolecular Pum
ps
STP-iX457/iXU4
57 Series
Instruction Manual
Copyright 2017
Edwards Japan Li
mited. All rights reserv
ed. Printed
in Japan.
Read through the S
afety Precau
tions and
each section of this
Manual carefully
before
using the STP pum
p.
Keep this Manual i
n a place where y
ou can
quickly access it
at any
time.
Original Instruction
s
2
Table of Contents
Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Rotation Instruction Label
17
Operation Principle of the STP Pump
18
Cross Sectional View of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Control Unit
22
External Appearance of the STP Pump
23
External Appearance of STP-Ix457
23
External Appearance of STP-Ix457C
24
External Appearance of STP-Ixu457
25
External Appearance of STP-Ixu457C
26
Label Affixing Positions
27
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Environmental Requirements for Installation
30
Installation Area
31
Space Around the STP Pump
31
Space Around the STP Pump (with Air-Cooling Unit [Optional Accessory])
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eyebolt Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
Jack-Up the STP Pump
35
Control Unit Bottom Face
35
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit
38
Control Unit Front Panel Functions
39
How to Install the STP Pump
40
Installation of the STP Pump to the Vacuum Equipment
40
Cleaning the Seal
41
STP Pump Installation Positions
42
Positions of the Outlet Port on the Horizontally
42
Secure the STP Pump
43
Tightening Torque of Bolt
43
Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
44
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
44
Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
45
Number of Claw Clamps for Flange Size
45
Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
46
Legs for Securing the Base
47
Recommended Leg for Securing Base
47
Screw Holes for Securing the Base
47
Rotation Stopper
48
External Power Supply Unit
49
DC Power Cable
49
DC Power Cable
51
Suitable Parts for DC Power Cable
51
Number of Claw Clamps for Flange Size
51
Vent Valve
52
Connecting the Vent Valve
52
Vent Valve Connection
52
Example of a Control Method
53
Vent Valve Output
54
X3 OPTION Connector Function Setting
54
Vent Valve Operation Setting
54
Precautions of Vacuum Piping
55
Vacuum Piping Method
56
Height of Purge Port
56
Attaching a Baking Heater
57
Baking Heater Installation Position
57
Cooling the STP Pump
58
Air-Cooling Unit
58
Air-Cooling Unit U1-86
59
3.12.1 Parts List
59
3.12.2 Installation Procedure
59
3.12.3 Maintenance
60
Connecting to Semiconductor Equipment
61
3.13.1 Connecting to Power
61
Emergency off Circuit (EMO Circuit)
61
Operation
63
Gas Pumping, Cooling and Baking the STP Pump
63
Gas Pumping
63
How to Introduce a Purge Gas
64
Baking the STP Pump
64
Before Starting the STP Pump
65
Confirmation before Starting
65
Confirmation of Vacuum System
65
Powering on
66
Pump Operation
66
Input Operation Port Setting
66
Starting/Stopping the STP Pump
66
Pump Operation Method
66
Starting/Stopping the STP Pump (X2 REMOTE)
66
How to Start/Stop the STP Pump
67
Starting the STP Pump after Stopping
67
Starting the STP Pump after a Safety Function Operates
67
Powering off
67
Reset Operation (X2 REMOTE)
67
Led
68
Flash Pattern of STATUS
68
Parallel Port Input/Output Signal
69
Input Signal Pins
69
X2 REMOTE Connector
69
X2 REMOTE Input Signal Pins
70
X2 REMOTE Input Signal Pins (Contact Input)
71
Input Operation Port Setting
72
X2 REMOTE Pin Function Matrix for Input Signal
72
(Type-A PROG-IN)
72
(Type-B PROG-IN)
72
Second Speed Option
73
Second Speed Function
73
Output Signal Pins
74
X2 REMOTE Output Signal Pins
74
X2 REMOTE Output Signal Pins (Continued)
75
X2 REMOTE Output Signal Pins
76
Rated Contacts for Four Photo Relays
76
X2 REMOTE Output Signal Pin Which Changes
77
According to Abnormality Notification / Warning Notification
77
X2 REMOTE Output Signal Pin Which Changes According to Rotation Speed
77
Serial Communication Protocol
79
Introduction
79
Serial Port
79
Connection and Setting up
80
Signal Connection
80
X2 Connector (High Density D-Sub15)
80
X2 Pin Position
80
Connecting the RS485
82
RS485 Connections
82
Communication Parameter Setting
83
Input Operation Port Setting
83
Communication Parameters
83
Input Operation Port
83
Serial Communication Timeout Setting
84
Serial Communication Time out Setting
84
Recommended Items about Communication Cable Installation
85
Grounding Example (both Ends Grounding)
85
Grounding Example (Single Point Grounding)
85
Example of Ring Ferrite Core Installation
86
Example of Cable Installation in Metallic Duct
86
Example of Differential Signal Waveform
87
Protocol Specifications
88
General Description
88
PC to SIM Communication
88
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
89
Transmission Control Characters
89
Control Command
90
(In the RS232/RS485 Single Point Connection)
90
Query Command
91
(In the RS232/RS485 Single Point Connection)
91
Transmission Data Format
92
Frame Control (Checksum)
93
Error Control
93
Transmission Frame in the RS485 Multi-Point Connection
93
Control Command in the RS485 Multi-Point Connection
95
5.3.10 Query Command in the RS485 Multi-Point Connection
96
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection
97
Pump Operation Commands
97
5.3.12 Application Note
98
Block Diagram of Communication Process Example
98
Example of Answer Resending Process
99
Example of Response When the Command Is Sent Continuously
99
Example of Command Sending During Answer Data Reply
99
Example of Communication Cycle Process
100
Example of Command Sending Process
101
Command Specifications
102
Command List
102
Readmeas
103
Command
103
Readfailmess
104
Pump Operation Commands
104
Error Message Values
106
Error Message Values (Continued)
107
Readmodfonct
108
Pump Operation Mode
109
Readversion
110
Readcounters
111
Readsetpoint
112
Readmotortemp
112
5.4.10 Readstatus
113
5.4.11 Readevents
114
Remote Mode
114
Setspeedsetpoint
115
5.4.13 Readspeedsetpoint
116
5.4.14 Readmodfonctwithwarning
117
Warning Value Bit Assign
118
5.4.15 Readmeasvalue
120
5.4.16 Readoptionfunc
122
Parameter Setting Value
124
5.4.17 Setoptionfunc
126
5.4.18 Readcondition
129
5.4.19 Readeventswithtime
131
5.4.20 Setoptions
135
5.4.20.1 Second Speed Option Setting
135
Option Function Number and Parameter List
135
5.4.20.2 Second Speed Selection
136
5.4.21 Readoptions
137
5.4.21.1 Second Speed Function Setting
137
Option Function Number and Parameter List
137
5.4.21.2 Second Speed Select
138
Stp-Link and Power Supply Unit
139
STP-Link
139
Functions of STP-Link
139
Power Supply Unit
140
Power Supply Unit Ipd-240-24V
140
Safety Functions
141
Power Failure
141
Operation after a Power Recovery
142
Abnormal State of Magnetic Bearing (Disturbance)
143
Excessive Vibration (Disturbance)
143
Motor Driver Overload (DRV Overload)
143
Overheating Inside the STP Pump (MOTOR Overheat)
143
Overheating Inside the Control Unit (CNT Overheat)
143
Overspeed
144
WARNING" Function
144
Contents of WARNING Function
145
First Damage Limit
145
Second Damage Limit
145
Pump Run Time over
145
Pump Overload
146
Imbalance
146
Other Warning
146
WARNING Function Setting
147
Troubleshooting Immediately after Failure Occurs
148
After Power Failure
148
After Other Abnormality/Error
148
Troubleshooting
149
Indication of "STATUS" LED (Red Flash)
149
Maintenance and Inspection
153
Cleaning
154
Indication of "STATUS" LED (Green and Red Alternately)
155
No Indication of the "STATUS" LED (Red)
155
Maintenance and Inspection
157
Transporting for Repair or Overhaul
157
Inspecting the Deposit
158
Maintenance
159
Recommended Overhaul Intervals
159
Standard Replacement Parts
159
Recommended Maintenance Intervals for Main Parts
160
Storage and Disposal
163
Storage of the STP Pump
163
Disposal
164
Service, Spares and Accessories
165
Introduction
165
Service
165
Spares
165
Accessories
166
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Edwards STP-iX457 Series Specifications
General
Brand
Edwards
Model
STP-iX457 Series
Category
Water Pump
Language
English
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