EasyManua.ls Logo

Edwards STP-iX457 Series - User Manual

Edwards STP-iX457 Series
167 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Loading...
MT-86E-001-F
STP Series Turbomolecular Pumps
STP-iX457/iXU457 Series
Instruction Manual
Copyright 2017 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Original Instructions

Table of Contents

Questions and Answers:

Edwards STP-iX457 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iX457 Series
CategoryWater Pump
LanguageEnglish

Summary

Introduction to STP Pump Manual

Precautions for Safe Operation

Outlines essential safety measures for operating the STP pump, including gas handling.

Maintenance and Inspection Precautions

General safety guidelines to be followed during maintenance and inspection.

Technical Data and Specifications

STP Pump Detailed Specifications

Provides a table of technical specifications for STP pumps.

Control Unit Specifications

Lists the electrical and functional specifications of the control unit.

STP Pump Installation Guide

Precautions Before Installation

General safety and environmental precautions required prior to installing the pump.

Operating Environment Requirements

Specifies suitable ambient conditions for installing and operating the STP pump.

Unpacking and Lifting Procedures

Instructions for safely unpacking and lifting the heavy STP pump.

Installing the STP Pump

General instructions for mounting the STP pump into a vacuum system.

Securing the STP Pump

Methods and torque specifications for securely mounting the STP pump.

External Power Supply Unit Requirements

Lists specifications for external DC power supply units.

DC Power Cable Connection

Instructions and safety precautions for connecting the DC power cable.

Precautions for Vacuum Piping

Safety guidelines and best practices for connecting vacuum piping.

Connecting to Semiconductor Equipment

Considerations for integrating the pump with semiconductor manufacturing equipment.

STP Pump Operation Procedures

Gas Pumping, Cooling, and Baking

Covers operational procedures for gas pumping, cooling, and baking.

Pre-Operation Checks

Essential checks before starting the STP pump and confirming vacuum system readiness.

Powering ON and Pump Operation

Steps for powering on the unit and initiating pump operation.

Starting and Stopping the Pump

Methods for controlling pump start, stop, and restart after safety functions.

Serial Communication Protocol

Signal Connection and Setup

Instructions for connecting and configuring the serial port (RS232/RS485).

Safety Functions and Troubleshooting

Overview of Safety Functions

Explains how safety functions operate during abnormalities and errors.

Power Failure Response

Details the pump's behavior and safety measures during power failure.

Abnormal Magnetic Bearing and Vibration

Troubleshooting steps for magnetic bearing and excessive vibration issues.

Overspeed and Warning Functions

Explanation of overspeed conditions and the pump's warning system.

Maintenance and Inspection Procedures

General Maintenance and Inspection Precautions

Critical safety warnings and procedures to follow before maintenance.

Related product manuals