STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 49
INSTALLATION
3
3.12 Air-cooling unit U3-86
The air cooling unit consists of the following parts. Install them to the pump according to the
procedure.
3.12.1 Parts list
Item Q’ty Remarks
Air-cooling unit U3-86 1 Air-cooling unit
4
Hexagon socket bolt M10×16
4
Flat washer M10
4
Hexagon socket bolt M6×10
4
Flat washer M6
1 Plate
3.12.2 Installation procedure
1. Secure the plate to STP pump base with the hexagon socket bolts M10×16 (4 pcs).
2. Install the air-cooling fan to STP pump base with the hexagon socket bolts M6×10 (4 pcs).
3. Connect the fan cable to "X3 OPTION connecter".