STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 4
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Control unit 12
2.3 External appearance of the STP pump 13
2.4 Label affixing positions 17
3 INSTALLATION OF THE STP PUMP 19
3.1 Precautions before installation 19
3.1.1 Operating environment 19
3.1.2 Installation area 21
3.1.3 Bench 22
3.1.4 Insulation test 22
3.2 Unpacking and installation 23
3.3 Name and function of each part 27
3.3.1 Name and function of the pump 27
3.3.2 Name and function of the control unit 28
3.4 How to install the STP pump 30
3.4.1 Cleaning the seal 31
3.4.2 STP pump installation positions 32
3.4.3 Secure the STP pump 33
3.4.4 Legs for securing the base 37
3.4.5 Rotation stopper 38
3.5 External power supply unit 39
3.6 DC power cable 39
3.7 Vent valve 42
3.7.1 Connecting the vent valve 42
3.7.2 Vent valve output 44
3.8 Precautions of vacuum piping 45
3.8.1 Vacuum piping method 46
3.9 Introducing N
2
gas
(for the STP pump equipped with purge port) 46
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