STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page ii
PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.10 Attaching a baking heater 47
3.11 Cooling the STP pump 48
3.12 Air-cooling unit U1-86 49
3.12.1 Parts list 49
3.12.2 Installation procedure 49
3.12.3 Maintenance 50
3.13 Connecting to semiconductor equipment 51
3.13.1 Connecting to power 51
3.13.2 Emergency off circuit (EMO circuit) 51
4 OPERATION 53
4.1 Gas pumping, cooling and baking the STP pump 53
4.1.1 Gas pumping 53
4.1.2 How to introduce a purge gas 54
4.2 Baking the STP pump 54
4.3 Before starting the STP pump 55
4.3.1 Confirmation before starting 55
4.3.2 Confirmation of vacuum system 55
4.4 Powering ON 56
4.5 Pump operation 56
4.5.1 Input operation port setting 56
4.5.2 Starting/stopping the STP pump 56
4.6 How to start/stop the STP pump 57
4.6.1 Starting the STP pump after stopping 57
4.6.2 Starting the STP pump after a safety function operates 57
4.6.3 Powering OFF 57
4.7 LED 58
4.8 Parallel port input/output signal 59
4.8.1 Input signal pins 59
4.8.2 Input operation port setting 62
4.8.3 Second speed option 63
4.8.4 Output signal pins 64
5 SERIAL COMMUNICATION PROTOCOL 69
5.1 Introduction 69
5.2 Connection and setting up 70
5.2.1 Signal connection 70
5.2.2 Connecting the RS485 72
5.2.3 Communication parameter setting 73
5.2.4 Input operation port setting 73
5.2.5 Serial communication timeout setting 74
5.2.6 Recommended items about communication cable installation 75
5.3 Protocol specifications 78
5.3.1 General description 78
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 79
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