Edwards STP-iX457 Series - Maintenance and Inspection

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 143
7
SAFETY FUNCTIONS
Referred
Section
7.1.1
3.
6
3.
6
3.8.1
*1
The magnetic bearing output stops and the rotor is descended on the touch down bearing.
*2
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table 43 - Error List (continued)
Countermeasures
Contact Se
rvice office.
Contact Service office.
Contact Service office.
1.
Check whether or not a
power failure has occurred.
2.
Connect the power cable
correctly.
3.
Replace the power cable.
4.
Set the rated voltage ±
10 %.
Probable causes
1.
Failure of the STP pump.
2.
Failure of the control unit.
D
isconnection of the motor
temperature
sensor.
Failure of the
control unit.
1.
Power failure.
2.
Incorrect connection of the
power cable.
3.
Failure of the power cable.
4.
Failure of the power supply
vlotage.
Occurrence
condition
Excessive
magneti
c bearing
electric current
continues for 30
sec.
Abnormal
motor
temperature
detection
Rotaional speed
exceeds rated
speed
Insufficient power
supply
Pump operation
Touch down
*1
D
ecelerate and
stop
Free run
*2
D
ecelerate and
stop
(Error message)
I
nordinate
Current
M_Temp Lost
Overspeed 1, 2,
3
, 4
Power Failure