STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page
15
TECHNICAL DATA
2
Inlet
port flange
ISO100
ISO100F
ISO160
ISO160F
ICF152
ICF203
VG100
VG150
φA
130 165 180 225 152 203 182 235
φB
152 152 152 152 152 152 152 152
C 12 12 12 12 21 22 12 12
D 196 212 182 182 212 204 181 182
E 321
337 307
307
337 329 306 307
φF
- 145 - 200 130.2
181 160 210
G 22.5 22.5
- 22.5 11.25 9 22.5 22.5
φH
9
9 - 11 8.4 8.4 12 12
I
232 248 218 218 248 240 217 218
Figure 9 - External appearance of STP-iXU457
No.
Item Description
1 Center of gravity
2 Control unit
3 Outlet port flange KF25
4 Screw hole for securing the
base
4-M10
Depth 18
(4)