Edwards STP-iX457 Series - Cleaning

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 144
7
SAFETY FUNCTIONS
Referred
Section
5.2.5
*1
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table 44 - Error List (continued)
Countermeasures
Contact Service office.
Set the voltage to the rated
voltage ± 10%.
1.
Send a communication
command periodically at intervals of less than setting value.
2.
Check the communication
cable.
3.
Contact Service office.
Contact Service office.
Overhaul is needed
.
Contact Service office.
Probable causes
Failure of the
control unit.
P
ower supply voltage is o
ut of
specifications range.
1.
Insufficient user
application setting.
2.
Disconnection or break of
the communication cable.
3.
Failure of the control unit.
Failure of the
control unit.
Frequency of "Disturbance"
or
"
Power Failure" error.
Occurrence
condition
Redu
ction of
power supply
voltage in control
unit
Poor power supply
Communication
failure of the input
operation port
during
acceleration
and
normal operation
Abnormal rotatinal
speed detection
Damage point
excees setting
value
Pump operation
Free run
*1
D
ecelerate and
stop
D
ecelerate and
stop
Free run
*1
D
ecelerate and
stop
(Error message)
Power Supply
Fail
Serial Com. Fail
Speed Pulse
Lost
START NOT
ALLOWED