To Next PageTo Next PageWhat to do if Edwards STP-iXA3306C failure signal output from X2 REMOTE connector?
If there's a failure signal output from the X2 REMOTE connector of your Edwards Water Pump, refer to Table 50, "Error List", for recommended actions.
How to fix Edwards STP-iXA3306C FAILURE LED that doesn't extinguish after RESET?
If the FAILURE LED on your Edwards Water Pump does not turn off after a RESET, ensure the STP pump has stopped. Then, switch the primary power OFF and then ON again.
General| Brand | Edwards |
|---|---|
| Model | STP-iXA3306C |
| Category | Water Pump |
| Language | English |
Defines the manual's scope, terms, and safety icons.
Lists directives and standards the pump conforms to.
Outlines warranty terms, period, and disclaimers.
Details precautions for safe operation, including usable gases.
Precautions for performing maintenance and inspection.
Describes pump labels and explains its operation principle.
Details naming conventions for STP pump models.
Lists typical specifications for the STP pump models.
Provides gas flow rate data for different models.
Specifies conditions for cooling water usage.
Details specifications for the control unit.
Provides external dimensions and shows label locations.
General precautions for personnel and environment before installation.
Procedures and warnings for unpacking the heavy STP pump.
Identifies key parts of the STP pump and control unit.
Guides on installing the pump into vacuum equipment.
Safety and procedural precautions for vacuum piping.
Instructions for connecting purge, cooling, and baking systems.
Procedures for installing the TMS unit and its components.
Guidance on connecting to semiconductor equipment.
Instructions for gas pumping, cooling, and baking the STP pump.
Importance of cooling the STP pump during operation.
Checks, confirmations, and detailed procedures before starting and stopping.
Explains the meaning of the pump's LEDs and operation modes.
Details the parallel port signals for remote control.
Instructions for operating the TMS unit.
Guides on connecting and configuring serial ports.
Details the STP serial communication protocol.
A comprehensive list of available commands and their functions.
Describes the STP-Link Windows application.
Describes the iDT-001 display unit.
Overview of safety functions for abnormalities and errors.
Describes pump behavior during power failure and recovery.
Details safety functions for various abnormal states.
Explanation of warning functions, indications, and settings.
Steps for troubleshooting after a failure or error occurs.
Interpreting LED indications for troubleshooting.
General precautions for maintenance and inspection.
Procedures for cleaning and inspecting the STP pump for deposit.
Information on overhaul intervals and replacement parts.
Procedures for safely transporting the pump for service.
Precautions for storing the STP pump long-term.
Guidelines for disposing of the STP pump.
Information on ordering parts and services.
Overview of Edwards service options.
Information on available spare parts and replacement.
List of available accessories.
