Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 156
7
SAFETY FUNCTIONS
Referred
Section
5.2.5
3.11
Table
54 - Error List
(continued)
Countermeasures
Contact Service office.
Contact Service office.
Overhaul is needed
.
Contact Service office.
1. Send
a communication
command periodically at intervals of less than setting value
.
2. Check the communication
cable.
3. Contact Service office.
Contact Service office.
1. Connect the
electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2. Contact Service office.
Pro
bable causes
Failure of the
control unit.
Failure of the
control unit.
Frequency of "Disturbance"
or
"Power
Failure" error
.
1. Insufficient user
application setting
.
2. Disconnection
or break
of
the
communication cable.
3. Failure of the
control unit.
Failure of th
e control unit.
1. Cooling failure of
TMS unit
.
2. Failure of TMS unit.
Occurrence
condition
Power supply circuit
failure
in
control unit
Failure
of RAM
check in MPU
Damage point excees setting value
Communication failure of the input operation port during acceleration
and
normal operation
Abnormal rotatinal speed detection
TMS temperature control error (when the TMS unit
detection
temperature becomes higher than the setting value by 10°C (+18 ºF)
or more.
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
Decelerat
e and
stop
Decelerat
e and
stop
Decelerat
e and
stop
Decelerat
e and
stop
(Error
message
)
Power Supply Fail
Ram Error
Second Damage Limit
Serial Com. Fail
Speed Pulse Lost
TMS Higher Temp
"FAILURE"
LED
Steady
red

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English