Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 49
INSTALLATION
3
3.9 Installation of the TMS unit
WARNING
The STP pump operates at high temperatures while the Temperature Management
System (TMS) unit is in operation. NEVER touch or remove the heater cover. It
causes electric shock or burns. NEVER touch the STP pump and its peripheral
equipment while TMS unit are in operation. Operators can burn hands.
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump,
and performing the TMS valve and TMS heater ON/OFF control in order to maintain a constant
temperature of the STP pump.
The control unit is always water-cooled. Connect the pump and TMS valve according to Figure 30.
CAUTION
DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other
unstable environment.
CAUTION
DO NOT apply force to the cables during installation and DO NOT place heavy objects on the
cables or bend them excessively.
3.9.1 TMS unit specification
Item
Condition
Temperature control method
Control ON/OFF of the TMS heater and cooling water
Setting temperature
°C
Standard type: 70
Failure output
Failure outputs from the STP control unit
TMS heater voltage
ACV (Hz)
220 (50/60)
TMS heater capacity
W
300
TMS valve voltage
DCV
24
Table 13 - TMS unit specification

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English