STP-iXA3306 Series Turbomolecular Pump
4.1.2 How to introduce a purge gas
CAUTION
When pumping reactive or corrosive gas, gas including hydrogen, introduce a purge gas to protect
the inside of the STP pump. Not to do so may result in product damage.
Connect a needle valve or a similar part to the purge port and introduce a dry N
2
gas or other gas to
perform a gas purge (see Section 3.10, "Connecting the purge port").
CAUTION
Refer to Section 2.1, “STP pump specification” for the specification of each pump for the proper
amount of the gas purge to introduce.
High-pressure at the inlet port may result in a noise. This is no abnormality/error.
4.2 Cooling the STP pump
When pumping gases or performing baking, always cool the STP pump.
Also, when performing baking, always cool the STP pump.
If the TMS unit is used, cool the STP pump with the method specified for the TMS unit.
4.2.1 Water-cooling method
The following precautionary procedures will need to be addressed:
ď‚· Connect the connecting hoses correctly to prevent from water leak. Refer to Section 2,
"TECHNICAL DATA" for the TMS unit condition.
ď‚· Use clean water as much as possible. Cooling water containing foreign materials may corrode or
clog the cooling water pipe. When the cooling system is clogged with foreign materials, clogs
may possibly be removed by feeding cooling water reversibly.
ď‚· When the STP pump is not to be used for a long period of time or it is to be moved after use,
introduce compressed air from one side of the cooling water port so that no water will remain
inside.
ď‚· When the STP pump is overheated due to shortage or suspension of water, the protective
function detects the overheated condition in the STP pump and stops the STP pump.
As a further safety procedure, attach a flow switch to the cooling water exit so that the STP pump
stops if abnormal cooling water flow occurs (A flow switch is available on the market).
ď‚· The joint for water-cooling unit is made of stainless steel. To prevent corrosion, connect the
stainless steel joint.
Note: Refer to Section 2.3, "Condition for the water-cooling unit" for the water-cooling unit.
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