Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 153
7
SAFETY FUNCTIONS
Referre
d
Section
4.1
4.1
4.4.2
4.4
3.1.1
2.3
4.10.1
*1
The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas fro
m the purge port into the STP pump.
Table
51 - Error List
(continued)
Countermeasures
1. Set the temperature of the
baking heater to 120
°C or
less.
2. At the time of baking or gas
pumping,
always cool the
STP pump.
3. Check the piping sys
tem
for leakage.
4. Repetitious start/stop
operations may cause the STP pump to overheat.
5. Replace the air
-cooling fan.
Contact Service office.
1. Set the ambient
temperature to 40
°C or
less.
2. Set the
cooling water flow
rate at 3 L/min and cooling water
temperat
ure
between
15 to 35
℃.
3. Replace the air
-cooling fan.
Contact Service office.
Check the vacuum piping system for leakage.
Check
the exhaust sequence.
Turn "OFF" the
switch
to stop
the pump, and then turn "ON" the
switch
again to recover.
Probable causes
1. Overheating during baking
.
2. Insufficient cooling
.
3. Leakage of the vacuum
piping system
.
4. Repetiti
ve start/stop
operations
.
5. Failure of
the air
-cooling
fan.
1. High ambient temperature
.
2. Insufficient cooling of the
control unit
.
3. Failure of
the air
-cooling
fan.
Atm
ospheric air flows the STP
pump
.
Occurrence
condition
Overheating inside the STP pump
Overheating inside the
control
unit
Rotational speed increases
in brake
or Levitation state
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
Free
run
*1
(Error
message
)
MOTOR Overheat
CNT Overheat 1, 2, 3
Aberrant Accel
"FAILURE"
LED
3 flashes in red
Steady
red

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English