Edwards STP-iXA3306C User Manual

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 154
7
SAFETY FUNCTIONS
Referred
Section
*1
The driver output stops and the rotor continue rotating by inertia.
It may take severa
l hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the
STP pump.
Table
52 - Error List
(continued)
Countermeasures
Contact Service office.
1. Per
form re
-start operation
after resetting.
2. Contact Service office.
Contact Service office.
1. Perform re
-start operation
after resetting.
2. Contact Service office. Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Con
tact Service office.
Contact Service office.
Probable causes
Failure of the
control unit.
1. Malfunction by external
noise
.
2. Failure of the
control unit.
Failure of the
control unit.
1. Malfunction by external
noise
.
2. Failure of the
control unit.
Failure of the
control unit.
1. Short
-circuit or ground fault
in the
motor
winding
.
2. Failure of the
control unit.
Failure of the
control unit.
1. Wea
r-out of the cooling
water bearing
.
2. Failure of the
control unit.
1. Failure of the STP
pump.
2. Failure of the
control unit.
Occurren
ce
condition
The r
otation
does
not
stop
after
30
min.
into brake
state
Accelerate up to 2000 rpm or less
Communication failure
in the
control unit
Communication failure with m
otor
control board
Communication failure with m
otor
control board
Motor driver ov
er
current
Motor driver over voltage
Cooling fan come to a stop
Excessive magnetic bearing electric current continues for 30 sec.
Pump operation
Free run, or decelerat
e and
stop
Stop
Decelerate and stop
Decelerat
e and
stop
Decelerat
e and
stop
Free run
*1
Free run
*1
Decelerate and stop
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
(Error
message
)
Aberrant Brake
Acc Malfunction
AMB Com. Failure
Driver Failure
DRV Com. Failure
DRV Overcurrent
DRV Ove
rvoltage
FAN Trouble
Inordint Current
"FAILURE"
LED
Steady
red

Edwards STP-iXA3306C Specifications

General

Brand	Edwards
Model	STP-iXA3306C
Category	Water Pump
Language	English