STP-iXA3306 Series Turbomolecular Pump
7.5 Troubleshooting immediately after failure occurs
The STP pump is provided with safety functions for various abnormities/errors.
A safety function operates when an abnormality/error occurs. The "FAILURE" LED illuminates or
flashes. Also, the failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is
found when using the STP pump, check it and take measures in accordance with the following
procedures. If you cannot trace the cause of the error or if the STP pump does not function normally
after troubleshooting, fill in the necessary information in the "Return Declaration" form and fax it to the
Service office.
7.5.1 After power failure
It is recommended to establish a procedure so that the power can be supplied to the STP pump
immediately after a power recovery.
7.5.2 After other abnormality/error
WARNING
When disconnecting cables from the STP pump and/or the cables to perform
troubleshooting and take the necessary action, confirm that the STP pump has
stopped, power off the primary power (switch the MAIN POWER to "OFF") and
isolate (Lockout/Tagout) the electrical energy source water and gas and other
energy sources on the vacuum equipment. Failure to do so may result in the
inadvertent rotation of the STP pump which may result in an accident, an electric
shock or damage to equipment. Moreover, an accident caused by water leaks or gas
leak may occur.
CAUTION
If the RESET operation does not extinguish the "FAILURE" LED, confirm that the STP pump has
stopped, turn OFF the primary power (Switch the switch "OFF"), then turn ON the primary power
(Switch the switch "ON") again.
1. After confirming the "ROTATION" LED has extinguished and the STP pump has stopped, remove
the probable cause of the abnormality.
When the "FAILURE" LED illuminates or flashes, follow the recommended actions given in Table
50, "Error List".
2. Perform the RESET operation to extinguish the "FAILURE" LED.
3. Perform the START operation. Check if the STP pump operates correctly.
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