STP-iXA3306 Series Turbomolecular Pump
3.9.3 TMS heater
The TMS heater heats the base of the STP pump. It’s fitted with the STP pump at the factory. A fuse
is set in the TMS heater cable of the STP-iXA3306 series.
3.9.4 Connecting the TMS heater cable
Insert the TMS heater cable into the connector "X12 HEATER" connector of the control unit. (see
Figure 17, "Control unit (Front panel)" for the position of the connector X12.)
3.9.5 TMS valve
The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP
pump. The shape of the TMS valve varies according to specifications.