STP-iXA3306 Series Turbomolecular Pump
2.2.2 STP-iXA3306B/BV
Table 3 - Maximum gas flow-rate (STP-iXA3306B)
Table 4 - Maximum gas flow-rate (STP-iXA3306BV)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the purge gas
flow rate <N
2
> 8.4×10
-2
±1.7×10
-2
Pa•m
3
/s (50±10 SCCM) is used. It is changed depending on condition. For example, when
the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact
Edwards.