STP-iXA3306 Series Turbomolecular Pump
7.6 Troubleshooting
7.6.1 Indication of "FAILURE" LED (red)
The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error.
When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the
failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found, take
measures in accordance with Table 50 to Table 55.
Table 49 - Priority of failure signal
Disturbance
(1 flash in red)
DRV Overload
(2 flashes in red)
MOTOR Overheat
CNT Overheat
(3 flashes in red)
Corresponding to
failure type
FAILURE N.O OUT
(14)–(33)
Power Failure
Overspeed
(steady in red)
FAILURE N.C OUT
(15)–(33)
Figure 58 - Failure output
Note: The STP-Link (optional accessory) and the display unit (optional accessory) display an error
as a message. Also, the errors being detected can be read via serial communication.