STP-iXA3306 Series Turbomolecular Pump
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 13
2.1 STP pump specifications 13
2.2 Maximum gas flow-rate 14
2.2.1 STP-iXA3306C/CV 14
2.2.2 STP-iXA3306B/BV 15
2.3 Water cooling use condition 16
2.4 Control unit 17
2.5 External appearance of the STP pump 19
2.6 Label affixing positions 20
3 INSTALLATION OF THE STP PUMP 21
3.1 Precautions before installation 21
3.1.1 Operating environment 21
3.1.2 Installation area 23
3.1.3 Bench 24
3.1.4 Insulation test 24
3.2 Unpacking 25
3.2.1 Unpacking the STP pump 25
3.3 Name and function of each part 29
3.3.1 Name and function of the pump 29
3.3.2 Name and function of the control unit 30
3.4 How to install the STP pump 33
3.4.1 Cleaning the seal 34
3.4.2 STP pump installation positions 35
3.4.3 Secure the STP pump 36
3.4.4 Legs for securing the base 40
3.4.5 Power cable 41
3.4.6 How to connect the power cable 43
3.5 Precautions of vacuum piping 45
3.5.1 Vacuum piping method 45
3.6 Connecting the purge port 46
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