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Edwards STP-F2203 Series User Manual

Edwards STP-F2203 Series
63 pages
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MT-00E-001-M
D
Applicable Models:
STP-301/451 series
STP-L301/L451 series
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
STP-A2203 series
STP-A2503/A3003 series
STP-A2803/A3503 series
STP-F2203 series
STP-XH2603P/XH3203P series
STP-XA2703/XA3203 series
STP-XA4503 series
STP-XW3503 series
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B):
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
2023.08

Table of Contents

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Edwards STP-F2203 Series Specifications

General IconGeneral
ModelSTP-F2203 Series
TypeWater Pump
Flow RateVaries by model. See datasheet.
Max Flow RateVaries by model. See datasheet.
Max HeadVaries by model. See datasheet.
Power ConsumptionVaries by model. See datasheet.
Motor PowerVaries by model. See datasheet.
Max PressureVaries by model. See datasheet.
WeightVaries by model. See datasheet.
Inlet SizeVaries by model. See datasheet.
Outlet SizeVaries by model. See datasheet.
Power SourceVaries by model. See datasheet.
MaterialVaries by model. See datasheet.
Operating TemperatureVaries by model. See datasheet.

Summary

Instruction Manual (A)

STP pump generic Instruction Manual

Generic instruction manual for the STP pump series.

Applicable Models

List of STP pump models covered by this manual.

INTRODUCTION

Scope and definitions

Defines the scope and key terms used in the manual.

Electromagnetic compatibility

Information on EMC standards and suitability for industrial environments.

Limited warranty

Details the warranty terms and conditions for the product.

Precautions for safe operation

Essential safety guidelines for operating the STP pump.

Usable gases

Specifies which gases can be safely used with the STP pump.

Maintenance and inspection precautions

Precautions to be taken during maintenance and inspection procedures.

Safety labels

Description and meaning of various safety labels on the pump.

Heavy product and connector warnings

Safety warnings related to handling heavy products and connectors.

TMS heater and rotation labels

Labels concerning TMS heater and pump rotational direction.

Operation principle of the STP pump

Explanation of how the STP series turbomolecular pumps function.

Temperature management system

Details on the Temperature Management System (TMS) for pump temperature control.

Name of the STP pump

Identification and labeling of the STP pump components.

INSTALLATION OF THE STP PUMP

Precautions before installation

Important safety and environmental considerations before installing the pump.

Operating environment

Required ambient conditions for proper STP pump installation.

Installation equipment conditions

Conditions related to external equipment and environment for installation.

Installation area

Guidelines for selecting a suitable location for pump installation.

Bench requirements

Specifications and requirements for the bench used to secure the STP pump.

Unpacking the STP pump

Procedures and precautions for safely unpacking the STP pump.

How to install the STP pump

Detailed steps and safety measures for installing the STP pump.

Cleaning the seal

Instructions for cleaning pump seals before installation.

STP pump installation positions

Information on different orientations for installing the STP pump.

Securing the STP pump

Methods for securely mounting the STP pump to vacuum equipment.

Vacuum piping precautions

Safety guidelines for connecting vacuum piping to the STP pump.

Vacuum piping method

Recommended methods for connecting vacuum piping.

Connecting the purge port

Instructions for connecting the purge port for gas protection.

Connecting the water cooling pipe

Guidelines for connecting the water cooling system to the pump.

Attaching a baking heater

Instructions for attaching a baking heater for process heating.

Air cooling unit installation

Installation details for the optional air cooling unit.

TMS unit installation

Installation details for the optional Temperature Management System (TMS) unit.

INSTALLATION OF THE STP CONTROL UNIT

STP control unit overview

Introduction to the STP control unit and its safety warnings.

SCU-350 series control unit

Details specific to the SCU-350 series STP control unit.

SCU-800/801 control unit

Details specific to the SCU-800/801 series STP control unit.

SCU-1600/1601 control unit

Details specific to the SCU-1600/1601 series STP control unit.

Cable connection

Information on connecting various cables to the STP control unit.

STP connection cable

Details on the STP pump to control unit connection cable.

Power cable

Information on connecting the power cable to the control unit.

How to connect the cables

Step-by-step instructions for connecting all necessary cables.

OPERATION

Before starting the STP pump

Checks and procedures to perform before starting the STP pump.

Tuning procedure

Instructions on how to perform pump tuning for optimal operation.

Vacuum system operation

Guidelines for operating the vacuum system with the STP pump.

Starting backing-pump

Procedure for starting the backing pump in relation to the STP pump.

Stopping backing-pump

Procedure for stopping the backing pump in relation to the STP pump.

Pump operation

General operation procedures for the STP pump.

LED indication during operation

Explanation of the LED indicators during pump operation.

Restarting after safety function

Procedure to restart the pump after a safety function has been triggered.

Gas pumping, cooling, and baking

Procedures for pumping gases, cooling, and baking the STP pump.

Gas pumping

Guidelines and safety precautions for pumping various gases.

How to introduce purge gas

Instructions for introducing purge gas for pump protection.

Cooling the STP pump

Methods and precautions for cooling the STP pump.

Water-cooling method

Detailed instructions for the water-cooling method.

Air-cooling method

Instructions for using the air-cooling unit as an alternative.

Baking the STP pump

Procedure for baking the STP pump, including temperature limits.

How to use the TMS unit

Guidance on operating the Temperature Management System (TMS).

Parameter set mode

How to configure TMS unit parameters via the parameter set mode.

Starting/stopping the TMS unit

Instructions for starting and stopping the TMS unit operation.

Temperature control

Details on how the TMS unit controls pump base temperature.

SAFETY FUNCTIONS

Safety functions overview

Overview of the safety functions for abnormality and error detection.

Power failure safety

How the pump behaves and is protected during a power failure.

Operation after power recovery

Procedure to resume operation after a power interruption.

Abnormal magnetic bearing state

Troubleshooting for abnormal conditions of the magnetic bearing.

Excessive vibration

Causes and responses to excessive vibration during operation.

Motor driver overload

Handling of motor driver overload conditions.

Overheating inside STP pump

Safety measures and responses for internal pump overheating.

Overheating inside control unit

Safety measures for overheating within the STP control unit.

Overspeed

Response to the STP pump exceeding its specified rotational speed.

TMS unit abnormality/error

Handling of abnormalities or errors detected by the TMS unit.

Air-cooling fan failure

Troubleshooting for failure of the air-cooling fan in the control unit.

MAINTENANCE AND INSPECTION

Maintenance and inspection procedures

General procedures and safety precautions for maintenance and inspection.

Cleaning the STP pump

Methods and precautions for cleaning the exterior and components of the pump.

Inspecting for deposit accumulation

Guidance on inspecting and managing deposit buildup inside the pump.

Maintenance

General information and schedule for pump maintenance.

Recommended overhaul intervals

Recommended intervals for pump overhaul based on usage conditions.

Standard replacement parts

List of standard parts replaced during overhauls, like bearings and O-rings.

Recommended maintenance intervals for main parts

Specific maintenance intervals for key pump components.

Transporting for repair or overhaul

Procedures and precautions for safely transporting the pump for service.

STORAGE AND DISPOSAL

Storage of the STP pump

Guidelines for storing the STP pump when not in use for extended periods.

Disposal of the STP pump

Instructions and safety warnings for the proper disposal of the STP pump.

SERVICE, SPARES AND ACCESSORIES

Introduction to service and spares

Information on obtaining service, spare parts, and accessories from Edwards.

Service options

Overview of the services offered by Edwards' global service network.

Spares availability

Information on the availability and replacement of spare parts.

Available accessories

List of optional accessories that can be purchased for the STP pump.