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Edwards STP-301 Series User Manual

Edwards STP-301 Series
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MT-21E-003-F
STP Series Turbomolecular Pumps
STP-301/451 Series
(Third Edition - f)
Instruction Manual
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Jan. 2008

Table of Contents

Questions and Answers:

Edwards STP-301 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-301 Series
CategoryWater Pump
LanguageEnglish

Summary

SAFETY PRECAUTIONS

SYMBOLS

Explains warning symbols used in the manual for safety guidance.

INTRODUCTION

APPLIED STANDARDS

Lists directives and standards the STP pump conforms to for compliance.

LIMITED WARRANTY

Precautions for Safe Operation of the STP Pump

Usable Gases

Details gases that can be used with specific pumps and associated warnings.

Precautions on Maintenance and Inspection

Safety guidelines before performing maintenance or inspection procedures.

Labels

Explains various caution and warning labels on the pump and control unit.

Operation Principle of the STP Pump

Unpacking

Accessories

Lists items included with the STP pump and control unit.

Installation of the STP Pump

Name and Function of Each Part

Identifies and explains the components of the STP pump.

Precautions Before Installation

Requirements for operating environment, installation area, and bench preparation.

How To Install the STP Pump

Covers seal cleaning, installation positions, securing, piping, and ground connection.

Connecting the Purge Port (For the Chemical Specific Pump, Type C)

How to connect the purge port for specific pump types.

Baking, Cooling the STP Pump and Gas Pumping

Baking the STP Pump

Procedure and precautions for baking the pump, including attaching a heater.

Cooling the STP Pump

Details on water and air cooling methods.

Gas Pumping

Procedure for introducing purge gas for chemical specific pumps.

Installation of the STP Control Unit

Name and Function of Each Part

Details of front, rear, top, and side panels of the control unit.

Precautions before Installation

Environmental requirements and insulation test warnings for control unit.

Installation Area

Space requirements around the control unit for installation.

Attaching the STP Control Unit Front Panel to a Rack

Steps for mounting the control unit onto a rack.

Cable Connection

Details and procedures for connecting ground, STP, and power cables.

Connecting to Semiconductor Equipment

Power connection and EMO circuit considerations for integration.

How to Start/Stop the STP Pump

Before Starting

Checklist of items to verify before starting the pump.

Start Procedures

Steps to start the backing pump and STP pump.

Stop Procedures

Steps to stop the STP pump and backing pump.

Manual Operation

Covers powering on, starting, stopping, and powering off in manual mode.

Remote Operation (I/O TB2)

Procedures for powering, starting, stopping, and powering off via I/O TB2.

Remote Operation (CON4: Optional Accessory)

Procedures for powering, starting, stopping, and powering off via CON4.

Remote Input/Output Signal Terminal Blocks

I/O TB1 Terminal Block

Details of the I/O TB1 terminal block for remote output signals.

I/O TB2 Terminal Block

Details of the I/O TB2 terminal block for remote input signals.

CON4 Connector (Optional accessory)

Details of CON4 connector for remote input and output signals.

Remote Cables (Optional Accessories)

Information on available remote cables.

Adjustment Method

Tuning

Procedure for tuning the STP pump for levitation alignment.

Setting the Rated Speed

How to set rated speed using dip switches and VR1 volume.

Safety Functions

Power Failure

How the pump behaves during a power failure and recovery.

Abnormal State of Magnetic Bearing

Symptoms and causes of magnetic bearing abnormalities.

Excessive Vibration

Causes and effects of excessive vibration.

Motor Driver Overload

What happens during motor driver overload.

Overheating Inside the STP Pump

Causes and effects of STP pump overheating.

Overheating Inside the STP Control Unit

Causes and effects of control unit overheating.

Overspeed

What happens during overspeed conditions.

Troubleshooting, Maintenance and Inspection

Troubleshooting Immediately After an Abnormality/Error Occurs

Immediate steps to take when an error occurs.

When Error Message is displayed

Explains how error messages are displayed and navigated.

Abnormalities When Powering ON

Troubleshooting common issues upon powering on.

Abnormalities When Performing the STP Pump Start Operation

Troubleshooting issues during pump start-up.

Other Abnormalities

Troubleshooting issues while the STP pump is rotating.

Maintenance and Inspection

Covers inspecting fan, replacing fuses, cleaning, deposit inspection, overhaul, and transport.

Storage and Disposal

Storage of the STP Pump

Precautions for storing the STP pump when unused.

Storage of the STP Control Unit

Precautions for storing the STP control unit when unused.

Disposal

Guidelines for disposing of the STP pump and control unit.

Specifications and Accessories

Specifications of the STP Pump

Technical specifications for the STP pump.

Specifications of the STP Control Unit

Technical specifications for the STP control unit.

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