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Edwards STP-301 Series - User Manual

Edwards STP-301 Series
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MT-21E-003-F
STP Series Turbomolecular Pumps
STP-301/451 Series
(Third Edition - f)
Instruction Manual
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Jan. 2008

Table of Contents

Questions and Answers

  • D
    Diana EdwardsAug 16, 2025
    What to do if Edwards STP-301 has POWER FAILURE?
    • K
      Kristopher AllenAug 16, 2025
      If the Edwards Water Pump experiences a power failure, first check if a power failure has actually occurred. Next, ensure the power cable is correctly connected. If the cable is damaged, replace it. Finally, verify that the power voltage is set correctly to 100 to 120V +/-10% (for 100V spec) or 200 to 240V +/-10% (for 200V spec).
  • M
    Mary WalkerAug 19, 2025
    Why does my Edwards STP-301 Water Pump show OVERLOAD?
    • T
      Timothy RodriguezAug 19, 2025
      The Edwards Water Pump may show an overload due to a motor driver overload. This can be caused by insufficient pressure at the inlet or outlet port, leakage in the piping system, or failure of the backing pump. To resolve this, ensure you are using the maximum working pressure or less, and the allowable backing pressure or less. Inspect the piping system for leaks and check the backing pump's capacity and start state, using a pump with the recommended capacity or more.
  • B
    beckethanAug 22, 2025
    How to troubleshoot insufficient ultimate pressure in Edwards STP-301?
    • C
      carrie78Aug 22, 2025
      To troubleshoot insufficient ultimate pressure in your Edwards Water Pump, check the following: * Inspect the backing pump for its capacity and start state, ensuring it meets the recommended capacity. * Examine the piping system for any leaks. * If residual molecules are present, and the main composition is H2 or H2O, perform baking. If it's other than H2 or H2O, clean the inside of the vacuum equipment.
  • V
    victoria49Aug 25, 2025
    What causes Edwards STP-301 to display CONTROLLER OT?
    • L
      larsentheresaAug 26, 2025
      The Edwards Water Pump displaying 'CONTROLLER OT' indicates overheating inside the STP control unit. This can be due to a high ambient temperature or insufficient cooling of the STP control unit. Ensure the ambient temperature is 40°C or less and remove any obstructions from the ventilation port.
  • S
    Sharon SimsAug 28, 2025
    What to do if Edwards STP-301 Water Pump displays DISTURBANCE?
    • D
      David RodriguezAug 28, 2025
      If the Edwards Water Pump displays 'DISTURBANCE', it may be due to an abnormal magnetic bearing or excessive external vibration. This can happen if the STP pump and control unit have different serial numbers, or if the cable length has been changed. Use units with the same serial number or perform tuning. Also, remove any external vibration to prevent it from affecting the pump. Check the piping and ensure no atmospheric air flows into the pump. Install the pump in a way that prevents foreign particles from entering.
  • W
    wadekelliAug 31, 2025
    Why is Edwards STP-301 showing PUMP OVERTEMP?
    • J
      Jonathan BakerAug 31, 2025
      The Edwards Water Pump may show 'PUMP OVERTEMP' due to overheating inside the STP pump. This can be caused by overheating during baking, insufficient cooling, leakage in the vacuum piping system, or repetitive start/stop operations. Set the baking heater temperature to 120°C or lower and always cool the STP pump during baking or gas suction. Check the piping system for leaks, and be aware that repetitive start/stop operations may cause overheating.
  • S
    Samantha ParkerSep 3, 2025
    How to fix Edwards STP-301 cable disconnect issue?
    • V
      Vanessa BarronSep 3, 2025
      To fix a cable disconnect issue with the Edwards Water Pump, ensure the STP connection cable is correctly connected and securely locked.
  • J
    Janet WallaceSep 6, 2025
    What to do if Edwards Water Pump breaker goes OFF when powering ON?
    • K
      Katherine PerrySep 6, 2025
      If the breaker goes OFF when powering on the Edwards Water Pump, it may be due to an abnormal power voltage, specifically if 200V is applied to a 100V spec STP control unit. Set the voltage to 100 to 120V +/-10%.
  • K
    keithporterSep 9, 2025
    What to do if Edwards STP-301 Water Pump power lamp does not light?
    • G
      Gabriel WaltonSep 9, 2025
      If the "POWER" lamp does not light when powering on the Edwards Water Pump, ensure the power cable is correctly connected. Also, verify that the power voltage is set to the correct range: 100 to 120V +/-10% (for 100V spec) or 200 to 240V +/-10% (for 200V spec). Finally, check whether a power failure has occurred.
  • T
    Tiffany MooreSep 12, 2025
    Why Edwards STP-301 Water Pump ACCEL lamp does not light?
    • R
      Ryan LittleSep 12, 2025
      If the "ACCEL." lamp on your Edwards Water Pump does not light, consider the following: * If in MANUAL operation, press the "SELECT" switch until the LCD displays "LEVITATION" or "BRAKE ***00rpm." * Ensure the "MANUAL/REMOTE" changeover switch is in the correct position. * For REMOTE operation, check and replace any blown fuses (F1 to 4) for remote signal input. * Verify the correct setting of DSW-B No.4 according to the remote input connector/terminal.

Summary

SAFETY PRECAUTIONS

SYMBOLS

Explains warning symbols used in the manual for safety guidance.

INTRODUCTION

APPLIED STANDARDS

Lists directives and standards the STP pump conforms to for compliance.

LIMITED WARRANTY

Precautions for Safe Operation of the STP Pump

Usable Gases

Details gases that can be used with specific pumps and associated warnings.

Precautions on Maintenance and Inspection

Safety guidelines before performing maintenance or inspection procedures.

Labels

Explains various caution and warning labels on the pump and control unit.

Operation Principle of the STP Pump

Unpacking

Accessories

Lists items included with the STP pump and control unit.

Installation of the STP Pump

Name and Function of Each Part

Identifies and explains the components of the STP pump.

Precautions Before Installation

Requirements for operating environment, installation area, and bench preparation.

How To Install the STP Pump

Covers seal cleaning, installation positions, securing, piping, and ground connection.

Connecting the Purge Port (For the Chemical Specific Pump, Type C)

How to connect the purge port for specific pump types.

Baking, Cooling the STP Pump and Gas Pumping

Baking the STP Pump

Procedure and precautions for baking the pump, including attaching a heater.

Cooling the STP Pump

Details on water and air cooling methods.

Gas Pumping

Procedure for introducing purge gas for chemical specific pumps.

Installation of the STP Control Unit

Name and Function of Each Part

Details of front, rear, top, and side panels of the control unit.

Precautions before Installation

Environmental requirements and insulation test warnings for control unit.

Installation Area

Space requirements around the control unit for installation.

Attaching the STP Control Unit Front Panel to a Rack

Steps for mounting the control unit onto a rack.

Cable Connection

Details and procedures for connecting ground, STP, and power cables.

Connecting to Semiconductor Equipment

Power connection and EMO circuit considerations for integration.

How to Start;Stop the STP Pump

Before Starting

Checklist of items to verify before starting the pump.

Start Procedures

Steps to start the backing pump and STP pump.

Stop Procedures

Steps to stop the STP pump and backing pump.

Manual Operation

Covers powering on, starting, stopping, and powering off in manual mode.

Remote Operation (I;O TB2)

Procedures for powering, starting, stopping, and powering off via I/O TB2.

Remote Operation (CON4: Optional Accessory)

Procedures for powering, starting, stopping, and powering off via CON4.

Remote Input;Output Signal Terminal Blocks

I;O TB1 Terminal Block

Details of the I/O TB1 terminal block for remote output signals.

I;O TB2 Terminal Block

Details of the I/O TB2 terminal block for remote input signals.

CON4 Connector (Optional accessory)

Details of CON4 connector for remote input and output signals.

Remote Cables (Optional Accessories)

Information on available remote cables.

Adjustment Method

Tuning

Procedure for tuning the STP pump for levitation alignment.

Setting the Rated Speed

How to set rated speed using dip switches and VR1 volume.

Safety Functions

Power Failure

How the pump behaves during a power failure and recovery.

Abnormal State of Magnetic Bearing

Symptoms and causes of magnetic bearing abnormalities.

Excessive Vibration

Causes and effects of excessive vibration.

Motor Driver Overload

What happens during motor driver overload.

Overheating Inside the STP Pump

Causes and effects of STP pump overheating.

Overheating Inside the STP Control Unit

Causes and effects of control unit overheating.

Overspeed

What happens during overspeed conditions.

Troubleshooting, Maintenance and Inspection

Troubleshooting Immediately After an Abnormality;Error Occurs

Immediate steps to take when an error occurs.

When Error Message is displayed

Explains how error messages are displayed and navigated.

Abnormalities When Powering ON

Troubleshooting common issues upon powering on.

Abnormalities When Performing the STP Pump Start Operation

Troubleshooting issues during pump start-up.

Other Abnormalities

Troubleshooting issues while the STP pump is rotating.

Maintenance and Inspection

Covers inspecting fan, replacing fuses, cleaning, deposit inspection, overhaul, and transport.

Storage and Disposal

Storage of the STP Pump

Precautions for storing the STP pump when unused.

Storage of the STP Control Unit

Precautions for storing the STP control unit when unused.

Disposal

Guidelines for disposing of the STP pump and control unit.

Specifications and Accessories

Specifications of the STP Pump

Technical specifications for the STP pump.

Specifications of the STP Control Unit

Technical specifications for the STP control unit.

Edwards STP-301 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-301 Series
CategoryWater Pump
LanguageEnglish

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