STP-301/451 Series Instruction Manual
4-3
Installation
4.2 Precautions Before Installation
4.2.1 Operating Environment
◇ Check the properties of the gas to be used, referring to the Material Safety Data
Sheet (MSDS) you obtain from the gas supplier. And, keep MSDS and a safety
advice of gas supplier.
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas
controlled if necessary. And, take measures according to MSDS to prevent an
accident caused by exhaust gas.
◇ Chlorine or fluorine system gases can be used only in chemical specific pumps
(type C). When you use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, Sn, or HBr, contact Edwards.
◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
STP-301/STP-451 pump or other models without anti-corrosion treatment.
◇ If the STP pump is used in an area with radiation, contact Edwards.
Install the STP pump in a place meeting the following requirements:
Ambient Temperature 0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment z A place free of externally-applied mechanical shock.
z A place free of a heat source
(Keep clear of the heat source or attach a thermal shield
plate).
z A place free of a strong magnetic field
(Range: up to 15 mT (150 G) in the axial direction, and up to
3 mT (30 G) in the radial direction with respect to the
rotational axis of the STP pump).
z A place free of a strong electric field.
z A place free of exposure to radiation.
z No discharge of high voltage (more than 500V)
(If more than 500 V is discharged, contact Edwards.)
STP Pump Installation
Equipment Conditions
z Install the STP pump securely so that foreign particles will
not easily fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump). (To prevent foreign
particles from falling into the STP pump, design a shield
plate with large conductance.)
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