Edwards STP-301 Series - Table of Contents

STP-301/451 Series Instruction Manual
8
TABLE of CONTENTS
SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump.........................1-1
1.1 Usable Gases..................................................................................................................1-1
1.2 Precautions on Maintenance and Inspection...................................................................1-1
1.3 Labels..............................................................................................................................1-2
2 Operation Principle of the STP Pump ...........................................2-1
3 Unpacking .....................................................................................3-1
3.1 Unpacking the STP Pump and the STP Control Unit ......................................................3-1
3.2 Accessories.....................................................................................................................3-1
4 Installation of the STP Pump.........................................................4-1
4.1 Name and Function of Each Part ....................................................................................4-1
4.2 Precautions Before Installation........................................................................................4-3
4.2.1 Operating Environment ..........................................................................................4-3
4.2.2 Installation Area .....................................................................................................4-4
4.2.3 Bench.....................................................................................................................4-4
4.3 How To Install the STP Pump .........................................................................................4-5
4.3.1 Cleaning the Seal...................................................................................................4-6
4.3.2 STP Pump Installation Positions ............................................................................4-7
4.3.3 How to Secure the STP Pump ...............................................................................4-8
4.3.4 Vacuum Piping .....................................................................................................4-12
4.3.5 Connecting the Ground Cable..............................................................................4-13
4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C) ...............4-14
5 Baking, Cooling the STP Pump and Gas Pumping .......................5-1
5.1 Baking the STP Pump .....................................................................................................5-1
5.1.1 Attaching a Baking Heater .....................................................................................5-1
5.2 Cooling the STP Pump....................................................................................................5-2
5.2.1 Water Cooling Method ...........................................................................................5-2
5.2.2 Air Cooling Method.................................................................................................5-3
5.3 Gas Pumping...................................................................................................................5-4
5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)] ................5-4
6 Installation of the STP Control Unit ...............................................6-1
6.1 Name and Function of Each Part ....................................................................................6-1
6.1.1 Front Panel.............................................................................................................6-1
6.1.2 Rear Panel .............................................................................................................6-3
6.1.3 Top Panel...............................................................................................................6-5
6.1.4 Side Panel (Left) ....................................................................................................6-6
6.2 Precautions before Installation ........................................................................................6-7