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Edwards STP-iS2207 Series User Manual

Edwards STP-iS2207 Series
165 pages
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MT-89E-001-C
STP Series Turbomolecular Pumps
STP-iS2207 Series
Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Original Instructions

Table of Contents

Questions and Answers:

Edwards STP-iS2207 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS2207 Series
CategoryWater Pump
LanguageEnglish

Summary

1 Introduction

1.1 Scope and definitions

Provides installation, operation, and maintenance instructions for the STP pump.

1.4 Precautions for safe operation of the STP pump

Details safety measures and warnings for operating the pump.

1.5 Maintenance and inspection precautions

Outlines precautions before performing maintenance or inspection.

1.7 Operation principle of the STP pump

Explains how the STP pump works and its key features.

2 Technical Data

2.1 STP pump specifications

Provides typical technical values for the STP pump models.

2.2 Maximum gas flow-rate

Details gas flow rates under different cooling conditions.

2.3 Water cooling use condition

Specifies conditions for using cooling water for the pump.

3 Installation of the STP Pump

3.1 Precautions before installation

General precautions to be taken before installing the STP pump.

3.2 Unpacking and installation

Guides on how to unpack and handle the STP pump during installation.

3.4 How to install the STP pump

Provides instructions for connecting the STP pump to vacuum equipment.

3.5 Precautions of vacuum piping

Outlines precautions for proper vacuum piping connection.

4 Operation

4.1 Gas pumping, cooling and baking the STP pump

Details on pumping gases, including safety warnings and precautions.

4.4 Before starting the STP pump

Checks to perform before starting the STP pump.

4.5 Powering ON

Steps to turn on the STP pump and indications.

4.6 Pump operation

Covers basic pump operation procedures.

5 Serial Communication Protocol

5.2 Connection and setting up

Details on connecting and configuring serial communication.

5.3 Protocol specifications

Explains the overall serial communication protocol structure.

5.4 Command specifications

A comprehensive list of available commands and their functions.

7 Safety Functions

7.1 Safety functions

Overview of the pump's safety functions for abnormalities and errors.

7.3 Contents of WARNING function

Details various warning conditions and their implications.

7.5 Troubleshooting immediately after failure occurs

Procedures to follow right after a failure occurs.

7.6 Troubleshooting

General troubleshooting guidance based on failure indications.

8 Maintenance and Inspection

8.1 Maintenance and inspection

General precautions and warnings for performing maintenance.

8.4 Maintenance

Covers recommended overhaul intervals and parts.

8.5 Transporting for repair or overhaul

Procedures and precautions for transporting the pump for service.

9 Storage and Disposal

9.1 Storage of the STP pump

Precautions and conditions for storing the STP pump long-term.

9.2 Disposal

Guidelines for safely disposing of the STP pump as industrial waste.

10 Service, Spares and Accessories

10.2 Service

Details on Edwards Service office support and options.

10.3 Spares

Information on spare parts availability and replacement.

10.4 Accessories

Lists available accessories for the STP pump.

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