Edwards STP-iS2207 Series - 9.2 Disposal

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 142
7
SAFETY FUNCTIONS
Referred
Section
7.1.1
3.8.2
3.8.2
3.8.1
3.5
*1
The magnetic bearing output stops and the rotor is descended on the touch down bearing.
*2
The driver output stops and the rotor continue rotating by inertia. It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the STP pump.
Table 41 - Error List (continued)
Countermeasures
Contact Service office.
Contact Service office.
Contact Service office.
1.
Check whether or not a
power failure has occurred.
2.
Connect the power cable
correctly.
3.
Replace the power cable.
4.
Set the rated voltage ±
10 %.
1.
Check the volume of water
and water temperature with
water cooling unit. In order to recover, turn off the power (switch "OFF"), and then switch "ON" after sufficient cooling of the control unit. (isolate input power supply 3 minutes or more)
2.
Contact Service office.
Probable causes
1.
Failure of the STP pump.
2.
Failure of the control unit.
D
isconnection of the motor
temperature
sensor.
Failure of the
control unit.
1.
Power failure.
2.
Incorrect connection of the
power cable.
3.
Failure of the power cable.
4.
Failure of
the power supply
vlotage.
1.
Insufficient cooling of the
control unit.
2.
Failure of the control unit.
Occurrence
condition
Excessive
magnetic bearing
electric current
continues for 30
sec.
Abnormal
motor
temperature
detection
Rotaional speed
exceeds rated
spe
ed
Insufficient power
supply
Overheat inside
the
control unit.
Pump operation
Touch down
*1
D
ecelerate and
stop
Free run
*2
D
ecelerate and
stop
(Error message)
Inordinate
Current
M_Temp Lost
Overspeed 1, 2,
3
, 4
Power Failure
"FAILURE"
LED
Steady red