STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 96
5
SERIAL COMMUNICATION PROTOCOL
Error message Value Error message Value
[System reservation] 66 [System reservation] 81
[System reservation] 67 [System reservation] 82
[System reservation] 68 [System reservation] 83
[System reservation] 69 [System reservation] 84
[System reservation] 70 [System reservation] 85
[System reservation] 71 [System reservation] 86
Aberrant Brake 72 [System reservation] 87
Aberrant Accel 73 Overspeed 4 88
[System reservation] 74 [System reservation] 89
[System reservation] 75 [System reservation] 90
Inordinate Current 76 WARNING: Pump Run Time Over
91
*1
[System reservation] 77 WARNING: Pump Overload 92
*1
Serial Com. Fail 78
*2
[System reservation] 93
[System reservation] 79 Other Warning 1 (C/U Restart) 94
*1
[System reservation] 80 Other Warning 2 (FAN Warning)
95
*1
Table 25 - Error message values (continued)
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2 When the setting value of serial communication timeout is 0, the error 78 is disabled (not detected).
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