STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page
56
4
OPERATION
4.8 LED
Three LEDs indicate the pump’s operational state.
LED
Power on
state
(Levitation
state)
Acceleration
state
Deceleration
state
Warning/
Failure state
POWER
(green)
Steady green
Steady green Steady green Steady green
(OFF only at power
failure)
ROTATION
(green/orange)
Extinguishes
Green Orange See left
2,000 rpm or less: 1 flash
2,000 to 10,000 rpm: 2 flashes
10,000 to 20,000 rpm: 3 flashes
20,000 to 33,000 rpm:
Continuous flash
33,000 to 36,500 rpm
or under normal operation:
Steady (see Figure 30)
FAILURE
(orange/red)
Warning state: Flashing orange
(The flashing pattern of the LED indicates the type of warning.
See Section 7, "SAFETY FUNCTION")
Failure state: Flashing or steady red
(The flashing pattern of the LED indicates the type of failure.
See Section 7, "SAFETY FUNCTION")
Table 11 - LED Indications for each state
ON
OFF
(2 flashes)
10,000 to 20,000 rpm
(3 flashes)
(Continuous flash)
33,000 to 36,500 rpm
or Normal operation state
(Steady)
1 cycle
2,000 rpm or moe
(1 flash)
消灯
OFF
OFF
OFF
ON
ON
ON
ON
LED luminescent color
Acceleration state: Green
Deceleration state: Orange
Figure 30 - "ROTATION" LED Indication
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