EasyManuals Logo

Edwards STP-iS2207 Series User Manual

Edwards STP-iS2207 Series
165 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Page #108 background imageLoading...
Page #108 background image
STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 98
5
SERIAL COMMUNICATION PROTOCOL
Pump operation mode Value
Levitation 1
No Levitation 2
Acceleration 3
Normal 4
Deceleration (Brake) 5
Autotest 6
[System Reservation] 7
[System Reservation] 8
[System Reservation] 9
[System Reservation] 10
[System Reservation] 11
Table 26 - Pump operation mode
Example:
Pump operation mode : 01
hex
= 1 = Levitation
The number of error : 02
hex
= 2 errors
Error 1 : 0D
hex
= 13 = Disturbance Xh
Error 2 : 0F
hex
= 15 = Disturbance Xb
Error 3 to 80 : 00
hex
= No error detected
Parameter
1 2 3 4 5 6 7 8 9 10 11
ASCII 0
1
0
2
0
D
0
F
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX 30
31
30
32
30
44
30
46
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
12 13
[Omitted]
68 69 70 71 72 73 74 75
ASCII 0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX 30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
76 77 78 79 80 81 82
ASCII 0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX 30
30
30
30
30
30
30
30
30
30
30
30
30
30

Table of Contents

Questions and Answers:

Question and Answer IconNeed help?

Do you have a question about the Edwards STP-iS2207 Series and is the answer not in the manual?

Edwards STP-iS2207 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS2207 Series
CategoryWater Pump
LanguageEnglish

Related product manuals