Edwards STP-iS2207 Series - 5.4.15 Readmeasvalue

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 109
5
SERIAL COMMUNICATION PROTOCOL
5.4.15 ReadMeasValue
Function: Reads the TMS temperature, motor temperature, motor current, measured rotational speed,
and control unit temperature. The motor temperature value is the same temperature as
"ReadMotorTemp". The measured rotational speed value is the same as "ReadMeas" parameter 2
(Measured rotational speed).
Transmission frame:
*1
PC->SIM Stx 0 0 1 ? [ Etx LRC
SIM->PC Ack
PC->SIM
*1
Ack
SIM->PC Stx 0 0 1 Sp [ Parameter 1 to 9 Etx LRC
*1 The HEX code of ASCII character ’[’ is "5B".
Parameter Item Data format Remark
1 [System reservation] 120-bits hexadecimal
coded ASCII
2
*1
TMS temperature
(Unit ºC)
16-bits hexadecimal
coded ASCII
3 Motor temperature
(Unit ºC)
16-bits hexadecimal
coded ASCII
4 [System reservation] 8-bits hexadecimal
coded ASCII
5 Motor current
(Unit: 0.1 A)
8-bits hexadecimal
coded ASCII
6 [System reservation] 24-bits hexadecimal
coded ASCII
7 Measured rotational speed
(Unit: Hz)
16-bits hexadecimal
coded ASCII
8 [System reservation] 48-bits hexadecimal
coded ASCII
9 Control unit temperature
(Unit: °C)
16-bits hexadecimal
coded ASCII
*1 Valid only with TMS specification